Model based optimization of process parameters to produce large homogeneous areas of laser-induced periodic surface structures

M. Mezera (Corresponding Author), G.R.B.E. Römer

    Research output: Contribution to journalArticleAcademicpeer-review

    8 Citations (Scopus)
    51 Downloads (Pure)

    Abstract

    A model is presented, which allows to predict the (in)homogeneity of large areas covered with Laser-induced Periodic Surface Structures (LIPSS), based on the laser processing parameters (peak laser fluence and geometrical pulse-to-pulse overlap) and experimentally determined material properties. As such, the model allows to establish optimal processing conditions, given the material properties of the substrate to be processed. The model is experimentally validated over a large range of geometrical pulse-to-pulse overlap values and fluence levels on silicon using a picosecond laser source.
    Original languageEnglish
    Pages (from-to)6012-6029
    Number of pages18
    JournalOptics express
    Volume27
    Issue number5
    DOIs
    Publication statusPublished - 20 Feb 2019

    Keywords

    • LIPSS

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