Model based optimization of process parameters to produce large homogeneous areas of laser-induced periodic surface structures

M. Mezera (Corresponding Author), G.R.B.E. Römer

    Research output: Contribution to journalArticleAcademicpeer-review

    4 Citations (Scopus)
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    Abstract

    A model is presented, which allows to predict the (in)homogeneity of large areas covered with Laser-induced Periodic Surface Structures (LIPSS), based on the laser processing parameters (peak laser fluence and geometrical pulse-to-pulse overlap) and experimentally determined material properties. As such, the model allows to establish optimal processing conditions, given the material properties of the substrate to be processed. The model is experimentally validated over a large range of geometrical pulse-to-pulse overlap values and fluence levels on silicon using a picosecond laser source.
    Original languageEnglish
    Pages (from-to)6012-6029
    Number of pages18
    JournalOptics express
    Volume27
    Issue number5
    DOIs
    Publication statusPublished - 20 Feb 2019

    Fingerprint

    optimization
    pulses
    lasers
    fluence
    homogeneity
    silicon

    Keywords

    • LIPSS

    Cite this

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    title = "Model based optimization of process parameters to produce large homogeneous areas of laser-induced periodic surface structures",
    abstract = "A model is presented, which allows to predict the (in)homogeneity of large areas covered with Laser-induced Periodic Surface Structures (LIPSS), based on the laser processing parameters (peak laser fluence and geometrical pulse-to-pulse overlap) and experimentally determined material properties. As such, the model allows to establish optimal processing conditions, given the material properties of the substrate to be processed. The model is experimentally validated over a large range of geometrical pulse-to-pulse overlap values and fluence levels on silicon using a picosecond laser source.",
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    author = "M. Mezera and G.R.B.E. R{\"o}mer",
    year = "2019",
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    doi = "10.1364/OE.27.006012",
    language = "English",
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    publisher = "The Optical Society",
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    Model based optimization of process parameters to produce large homogeneous areas of laser-induced periodic surface structures. / Mezera, M. (Corresponding Author); Römer, G.R.B.E.

    In: Optics express, Vol. 27, No. 5, 20.02.2019, p. 6012-6029.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Model based optimization of process parameters to produce large homogeneous areas of laser-induced periodic surface structures

    AU - Mezera, M.

    AU - Römer, G.R.B.E.

    PY - 2019/2/20

    Y1 - 2019/2/20

    N2 - A model is presented, which allows to predict the (in)homogeneity of large areas covered with Laser-induced Periodic Surface Structures (LIPSS), based on the laser processing parameters (peak laser fluence and geometrical pulse-to-pulse overlap) and experimentally determined material properties. As such, the model allows to establish optimal processing conditions, given the material properties of the substrate to be processed. The model is experimentally validated over a large range of geometrical pulse-to-pulse overlap values and fluence levels on silicon using a picosecond laser source.

    AB - A model is presented, which allows to predict the (in)homogeneity of large areas covered with Laser-induced Periodic Surface Structures (LIPSS), based on the laser processing parameters (peak laser fluence and geometrical pulse-to-pulse overlap) and experimentally determined material properties. As such, the model allows to establish optimal processing conditions, given the material properties of the substrate to be processed. The model is experimentally validated over a large range of geometrical pulse-to-pulse overlap values and fluence levels on silicon using a picosecond laser source.

    KW - LIPSS

    UR - http://www.scopus.com/inward/record.url?scp=85062893957&partnerID=8YFLogxK

    U2 - 10.1364/OE.27.006012

    DO - 10.1364/OE.27.006012

    M3 - Article

    VL - 27

    SP - 6012

    EP - 6029

    JO - Optics express

    JF - Optics express

    SN - 1094-4087

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    ER -