Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor

J.W. van Honschoten, Doekle Reinder Yntema, Remco J. Wiegerink, Michael Curt Elwenspoek

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    Abstract

    The sensitivity of an innovative acoustic sensor composed of four hot-wires is analyzed. An analytical model is presented that describes both the air flow and the temperature distribution in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while it also affects the temperature distribution. Both effects result into a specific angular dependence of the sensor sensitivity. Acoustic measurements are compared with theory, showing good correspondence.
    Original languageUndefined
    Title of host publicationMME 2008
    Place of PublicationAachen
    PublisherRWTH Aachen University
    Pages-
    Number of pages3
    ISBN (Print)978-3-00-025529-8
    Publication statusPublished - 2008
    Event19th MicroMechanics Europe Workshop, MME 2008 - Aachen, Germany
    Duration: 28 Sep 200830 Sep 2008
    Conference number: 19

    Workshop

    Workshop19th MicroMechanics Europe Workshop, MME 2008
    Abbreviated titleMME
    CountryGermany
    CityAachen
    Period28/09/0830/09/08

    Keywords

    • EWI-14655
    • METIS-255421
    • IR-65234

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