Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor

J.W. van Honschoten; Doekle Reinder Yntema; Remco J. Wiegerink; Michael Curt Elwenspoek

Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor

J.W. van Honschoten, Doekle Reinder Yntema, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

The sensitivity of an innovative acoustic sensor composed of four hot-wires is analyzed. An analytical model is presented that describes both the air flow and the temperature distribution in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while it also affects the temperature distribution. Both effects result into a specific angular dependence of the sensor sensitivity. Acoustic measurements are compared with theory, showing good correspondence.

Original language	Undefined
Title of host publication	MME 2008
Place of Publication	Aachen
Publisher	RWTH Aachen University
Pages	-
Number of pages	3
ISBN (Print)	978-3-00-025529-8
Publication status	Published - 2008
Event	19th MicroMechanics Europe Workshop, MME 2008 - Aachen, Germany Duration: 28 Sept 2008 → 30 Sept 2008 Conference number: 19

Workshop

Workshop	19th MicroMechanics Europe Workshop, MME 2008
Abbreviated title	MME
Country/Territory	Germany
City	Aachen
Period	28/09/08 → 30/09/08

Keywords

EWI-14655
METIS-255421
IR-65234

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Cite this

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title = "Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor",

abstract = "The sensitivity of an innovative acoustic sensor composed of four hot-wires is analyzed. An analytical model is presented that describes both the air flow and the temperature distribution in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while it also affects the temperature distribution. Both effects result into a specific angular dependence of the sensor sensitivity. Acoustic measurements are compared with theory, showing good correspondence.",

keywords = "EWI-14655, METIS-255421, IR-65234",

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year = "2008",

language = "Undefined",

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publisher = "RWTH Aachen University",

note = "19th MicroMechanics Europe Workshop, MME 2008 ; Conference date: 28-09-2008 Through 30-09-2008",

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T1 - Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor

AU - van Honschoten, J.W.

AU - Yntema, Doekle Reinder

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 19

PY - 2008

Y1 - 2008

N2 - The sensitivity of an innovative acoustic sensor composed of four hot-wires is analyzed. An analytical model is presented that describes both the air flow and the temperature distribution in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while it also affects the temperature distribution. Both effects result into a specific angular dependence of the sensor sensitivity. Acoustic measurements are compared with theory, showing good correspondence.

AB - The sensitivity of an innovative acoustic sensor composed of four hot-wires is analyzed. An analytical model is presented that describes both the air flow and the temperature distribution in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while it also affects the temperature distribution. Both effects result into a specific angular dependence of the sensor sensitivity. Acoustic measurements are compared with theory, showing good correspondence.

KW - EWI-14655

KW - METIS-255421

KW - IR-65234

M3 - Conference contribution

SN - 978-3-00-025529-8

SP - -

BT - MME 2008

PB - RWTH Aachen University

CY - Aachen

T2 - 19th MicroMechanics Europe Workshop, MME 2008

Y2 - 28 September 2008 through 30 September 2008

ER -