Modeling and characterization of the uWalker, a MEMS positioner for uSPAM

M. Patrascu, Stefano Stramigioli, Gijsbertus J.M. Krijnen, Edin Sarajlic

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 28 Feb 2005
    Event3rd International Probe Storage Workshop, IPSW 2005 - Zürich, Switzerland
    Duration: 28 Feb 20051 Mar 2005
    Conference number: 3

    Conference

    Conference3rd International Probe Storage Workshop, IPSW 2005
    Abbreviated titleIPSW III
    CountrySwitzerland
    CityZürich
    Period28/02/051/03/05

    Keywords

    • METIS-228618

    Cite this