Modeling and process design for laser interference lithography used in fabricating two-dimensional periodic structures

C.G. Bostan, R.M. de Ridder, I. van Dorssen, Hendricus A.G.M. van Wolferen, L. Kuipers, N.F. van Hulst

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
119 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Modeling and process design for laser interference lithography used in fabricating two-dimensional periodic structures'. Together they form a unique fingerprint.