Modeling and process design for laser interference lithography used in fabricating two-dimensional periodic structures

C.G. Bostan, R.M. de Ridder, I. van Dorssen, Hendricus A.G.M. van Wolferen, L. Kuipers, N.F. van Hulst

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)
187 Downloads (Pure)

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