Modeling and simulating the stick-slip motion of the μWalker, a MEMS-based device for μSPAM

In this paper, the accent is on modeling the stick–slip phenomenon of micro devices, where a case shall be presented from the field of scanning probe microactuators. The case is about the lWalker, an electrostatic stepper motor which can deliver forces up to 1.7 mN and has ranges up to 140 lm. For the sake of a reliable operation, it is very important to control the stick–slip effects at the sliding surfaces. In order to introduce the stick–slip effect, a basic model of a mass, spring and sliding surface is presented, accompanied by simulation results. The total model of the device is then shown, again stressing the stick–slip phenomenon at the two sliding surfaces. Simulations from the model presented fit the measurements and can also predict step sizes as a function of varying inputs. Using a model for predictions is very attractive when looking for a way to decrease development cost and time.