Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves

R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Albert van den Berg; Michael Curt Elwenspoek

Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves

R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Albert van den Berg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

36 Downloads (Pure)

Abstract

This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.

Original language	Undefined
Title of host publication	Second Symposium on Microsystems in Practice
Place of Publication	Gelsenkirchen, Germany
Pages	-
Publication status	Published - 25 Mar 1998
Event	MSM International Conference on Modeling and Simulation of Microsystems - Santa Clara, CA, USA Duration: 6 Apr 1998 → 8 Apr 1998

Conference

Conference	MSM International Conference on Modeling and Simulation of Microsystems
Period	6/04/98 → 8/04/98
Other	April 6-8, 1998

Keywords

IR-16133
METIS-113018

Access to Document

Oosterbroek98modeling

Cite this

@inproceedings{4a43d076d5ab4e03ab619d412d754c22,

title = "Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves",

abstract = "This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.",

keywords = "IR-16133, METIS-113018",

author = "R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1998",

month = mar,

day = "25",

language = "Undefined",

isbn = "9780966613506",

pages = "--",

booktitle = "Second Symposium on Microsystems in Practice",

note = "null ; Conference date: 06-04-1998 Through 08-04-1998",

}

Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves. / Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan ; Lammerink, Theodorus S.J.; van den Berg, Albert; Elwenspoek, Michael Curt.

Second Symposium on Microsystems in Practice. Gelsenkirchen, Germany, 1998. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1998/3/25

Y1 - 1998/3/25

N2 - This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.

AB - This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.

KW - IR-16133

KW - METIS-113018

M3 - Conference contribution

SN - 9780966613506

SP - -

BT - Second Symposium on Microsystems in Practice

CY - Gelsenkirchen, Germany

Y2 - 6 April 1998 through 8 April 1998

ER -