Original language | Undefined |
---|---|
Pages (from-to) | 171-178 |
Journal | Sensors and Actuators A: Physical |
Volume | 70 |
Publication status | Published - 1999 |
Keywords
- METIS-111691
Niels Roelof Tas, J. Wissink, A.F.M. Sander, Theodorus S.J. Lammerink, Michael Curt Elwenspoek
Research output: Contribution to journal › Article › Academic › peer-review
Original language | Undefined |
---|---|
Pages (from-to) | 171-178 |
Journal | Sensors and Actuators A: Physical |
Volume | 70 |
Publication status | Published - 1999 |