Modeling, design and testing of the electrostatic shuffle motor

Niels Roelof Tas, J. Wissink, A.F.M. Sander, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)171-178
    JournalSensors and actuators. A: Physical
    Volume70
    Publication statusPublished - 1999

    Keywords

    • METIS-111691

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