Modeling, design and testing of the electrostatic shuffle motor

Niels Roelof Tas, Jeroen Wissink, Theodorus S.J. Lammerink, Louis Sander, Michael Curt Elwenspoek, A.F.M. Sander

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    The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.
    Original languageUndefined
    Pages (from-to)171-178
    Number of pages8
    JournalSensors and Actuators A: Physical
    Issue number70
    Publication statusPublished - 1 Oct 1998


    • METIS-111680
    • IR-14576
    • EWI-13370

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