Modeling, design and testing of the electrostatic shuffle motor

Niels Roelof Tas; Jeroen Wissink; Theodorus S.J. Lammerink; Louis Sander; Michael Curt Elwenspoek; A.F.M. Sander

doi:10.1016/S0924-4247(98)00129-0

Modeling, design and testing of the electrostatic shuffle motor

Niels Roelof Tas, Jeroen Wissink, Theodorus S.J. Lammerink, Louis Sander, Michael Curt Elwenspoek, A.F.M. Sander

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.

Original language	Undefined
Pages (from-to)	171-178
Number of pages	8
Journal	Sensors and actuators. A: Physical
Volume	1998
Issue number	70
DOIs	https://doi.org/10.1016/S0924-4247(98)00129-0
Publication status	Published - 1 Oct 1998

Keywords

METIS-111680
IR-14576
EWI-13370

Access to Document

10.1016/S0924-4247(98)00129-0

JSAA_70_171

Cite this

@article{8622a7ca4e794b7eba3e20deb5f02f43,

title = "Modeling, design and testing of the electrostatic shuffle motor",

abstract = "The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.",

keywords = "METIS-111680, IR-14576, EWI-13370",

author = "Tas, {Niels Roelof} and Jeroen Wissink and Lammerink, {Theodorus S.J.} and Louis Sander and Elwenspoek, {Michael Curt} and A.F.M. Sander",

year = "1998",

month = oct,

day = "1",

doi = "10.1016/S0924-4247(98)00129-0",

language = "Undefined",

volume = "1998",

pages = "171--178",

journal = "Sensors and actuators. A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "70",

}

TY - JOUR

T1 - Modeling, design and testing of the electrostatic shuffle motor

AU - Tas, Niels Roelof

AU - Wissink, Jeroen

AU - Lammerink, Theodorus S.J.

AU - Sander, Louis

AU - Elwenspoek, Michael Curt

AU - Sander, A.F.M.

PY - 1998/10/1

Y1 - 1998/10/1

N2 - The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.

AB - The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.

KW - METIS-111680

KW - IR-14576

KW - EWI-13370

U2 - 10.1016/S0924-4247(98)00129-0

DO - 10.1016/S0924-4247(98)00129-0

M3 - Article

SN - 0924-4247

VL - 1998

SP - 171

EP - 178

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

IS - 70

ER -