Modeling, design and testing of the electrostatic shuffle motor

Niels Roelof Tas; Jeroen Wissink; Theodorus S.J. Lammerink; Louis Sander; Michael Curt Elwenspoek; A.F.M. Sander

doi:10.1016/S0924-4247(98)00129-0

Modeling, design and testing of the electrostatic shuffle motor

Niels Roelof Tas
, Jeroen Wissink
, Theodorus S.J. Lammerink
, Louis Sander
, Michael Curt Elwenspoek
, A.F.M. Sander

Research output: Contribution to journal › Article › Academic › peer-review

60 Citations (Scopus)

104 Downloads (Pure)

Abstract

The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.

Original language	Undefined
Pages (from-to)	171-178
Number of pages	8
Journal	Sensors and Actuators A: Physical
Volume	1998
Issue number	70
DOIs	https://doi.org/10.1016/S0924-4247(98)00129-0
Publication status	Published - 1 Oct 1998

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

METIS-111680
IR-14576
EWI-13370

Access to Document

10.1016/S0924-4247(98)00129-0

JSAA_70_171

Cite this

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abstract = "The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.",

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AU - Lammerink, Theodorus S.J.

AU - Sander, Louis

AU - Elwenspoek, Michael Curt

AU - Sander, A.F.M.

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N2 - The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.

AB - The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A model has been made to calculate the step size and the driving voltage as a function of the load force and the motor geometry. The motor consists of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 μN at 40 V driving voltage.

KW - METIS-111680

KW - IR-14576

KW - EWI-13370

U2 - 10.1016/S0924-4247(98)00129-0

DO - 10.1016/S0924-4247(98)00129-0

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JO - Sensors and Actuators A: Physical

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