Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor

This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm. The outer surface of the tube is metalized using a Cu plating process, resulting in a low electrical resistance of 0.5 Ω. The tube is brought into vibration using an AC current in combination with a magnetic field from a permanent magnet. The displacement of the tube is detected using a laser Doppler vibrometer (LDV) that is part of a Polytec MSA-600 microsystem analyzer. The Coriolis mass flow sensor has been tested over a flow range of 0–150 g/h for water, 0–38 g/h for isopropyl alcohol (IPA), and 0–50 g/h for nitrogen. The maximum flow rates of water and IPA resulted in less than a 30 mbar pressure drop. The pressure drop at the maximum flow rate of nitrogen is 250 mbar.