Modeling of an Integrated Electromagnetic Generator for Energy Scavenging

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    The ubiquitous deploying of wireless electronic devices due to pervasive computing results in the idea of Energy Scavenging, i.e., harvesting ambient energy from surroundings of the electronic devices. As an approach to possible practical realization of such an energy scavenger, we aim at the fabrication of an electromagnetic (EM) generator. The generator will be fully on-chip integrated, CMOS compatible, suitable for silicon post-processing, and will have a natural resonant frequency below 100 Hz. To the best of our knowledge, such an EM generator will be the first fully on-chip integrated energy harvester. We have designed an integrable EM generator and have developed a process flow entirely based on low temperature post-processing technology. Our EM generator is composed of a permanent micro-magnet, a spring, and copper coils. The resonant frequency of the generator will be tuned by the spring constant k and the mass of the magnet. The AC/DC module of COMSOL software was used to perform numerical simulations in order to determine optimal relative dimensions of the generator and the best possible position of the permanent micro-magnet with respect to the copper coils. Keywords: CMOS post-processing, electromagnetic generator, energy scavenging, deposition, micromachining, permanent magnet
    Original languageUndefined
    Title of host publication10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages603-607
    Number of pages5
    ISBN (Print)978-90-73461-49-9
    Publication statusPublished - 29 Nov 2007
    Event10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands
    Duration: 29 Nov 200730 Nov 2007

    Publication series

    Name
    PublisherTechnology Foundation STW
    Number7

    Workshop

    Workshop10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
    CountryNetherlands
    CityVeldhoven
    Period29/11/0730/11/07

    Keywords

    • EWI-11747
    • IR-64586
    • METIS-245952
    • SC-ICF: Integrated Circuit Fabrication

    Cite this

    Lu, J., Kovalgin, A. Y., & Schmitz, J. (2007). Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE) (pp. 603-607). Utrecht, The Netherlands: STW.
    Lu, J. ; Kovalgin, Alexeij Y. ; Schmitz, Jurriaan. / Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands : STW, 2007. pp. 603-607
    @inproceedings{5a7dbf3649824f5daaec3703734d3d7a,
    title = "Modeling of an Integrated Electromagnetic Generator for Energy Scavenging",
    abstract = "The ubiquitous deploying of wireless electronic devices due to pervasive computing results in the idea of Energy Scavenging, i.e., harvesting ambient energy from surroundings of the electronic devices. As an approach to possible practical realization of such an energy scavenger, we aim at the fabrication of an electromagnetic (EM) generator. The generator will be fully on-chip integrated, CMOS compatible, suitable for silicon post-processing, and will have a natural resonant frequency below 100 Hz. To the best of our knowledge, such an EM generator will be the first fully on-chip integrated energy harvester. We have designed an integrable EM generator and have developed a process flow entirely based on low temperature post-processing technology. Our EM generator is composed of a permanent micro-magnet, a spring, and copper coils. The resonant frequency of the generator will be tuned by the spring constant k and the mass of the magnet. The AC/DC module of COMSOL software was used to perform numerical simulations in order to determine optimal relative dimensions of the generator and the best possible position of the permanent micro-magnet with respect to the copper coils. Keywords: CMOS post-processing, electromagnetic generator, energy scavenging, deposition, micromachining, permanent magnet",
    keywords = "EWI-11747, IR-64586, METIS-245952, SC-ICF: Integrated Circuit Fabrication",
    author = "J. Lu and Kovalgin, {Alexeij Y.} and Jurriaan Schmitz",
    year = "2007",
    month = "11",
    day = "29",
    language = "Undefined",
    isbn = "978-90-73461-49-9",
    publisher = "STW",
    number = "7",
    pages = "603--607",
    booktitle = "10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)",

    }

    Lu, J, Kovalgin, AY & Schmitz, J 2007, Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. in 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). STW, Utrecht, The Netherlands, pp. 603-607, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007, Veldhoven, Netherlands, 29/11/07.

    Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. / Lu, J.; Kovalgin, Alexeij Y.; Schmitz, Jurriaan.

    10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands : STW, 2007. p. 603-607.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Modeling of an Integrated Electromagnetic Generator for Energy Scavenging

    AU - Lu, J.

    AU - Kovalgin, Alexeij Y.

    AU - Schmitz, Jurriaan

    PY - 2007/11/29

    Y1 - 2007/11/29

    N2 - The ubiquitous deploying of wireless electronic devices due to pervasive computing results in the idea of Energy Scavenging, i.e., harvesting ambient energy from surroundings of the electronic devices. As an approach to possible practical realization of such an energy scavenger, we aim at the fabrication of an electromagnetic (EM) generator. The generator will be fully on-chip integrated, CMOS compatible, suitable for silicon post-processing, and will have a natural resonant frequency below 100 Hz. To the best of our knowledge, such an EM generator will be the first fully on-chip integrated energy harvester. We have designed an integrable EM generator and have developed a process flow entirely based on low temperature post-processing technology. Our EM generator is composed of a permanent micro-magnet, a spring, and copper coils. The resonant frequency of the generator will be tuned by the spring constant k and the mass of the magnet. The AC/DC module of COMSOL software was used to perform numerical simulations in order to determine optimal relative dimensions of the generator and the best possible position of the permanent micro-magnet with respect to the copper coils. Keywords: CMOS post-processing, electromagnetic generator, energy scavenging, deposition, micromachining, permanent magnet

    AB - The ubiquitous deploying of wireless electronic devices due to pervasive computing results in the idea of Energy Scavenging, i.e., harvesting ambient energy from surroundings of the electronic devices. As an approach to possible practical realization of such an energy scavenger, we aim at the fabrication of an electromagnetic (EM) generator. The generator will be fully on-chip integrated, CMOS compatible, suitable for silicon post-processing, and will have a natural resonant frequency below 100 Hz. To the best of our knowledge, such an EM generator will be the first fully on-chip integrated energy harvester. We have designed an integrable EM generator and have developed a process flow entirely based on low temperature post-processing technology. Our EM generator is composed of a permanent micro-magnet, a spring, and copper coils. The resonant frequency of the generator will be tuned by the spring constant k and the mass of the magnet. The AC/DC module of COMSOL software was used to perform numerical simulations in order to determine optimal relative dimensions of the generator and the best possible position of the permanent micro-magnet with respect to the copper coils. Keywords: CMOS post-processing, electromagnetic generator, energy scavenging, deposition, micromachining, permanent magnet

    KW - EWI-11747

    KW - IR-64586

    KW - METIS-245952

    KW - SC-ICF: Integrated Circuit Fabrication

    M3 - Conference contribution

    SN - 978-90-73461-49-9

    SP - 603

    EP - 607

    BT - 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)

    PB - STW

    CY - Utrecht, The Netherlands

    ER -

    Lu J, Kovalgin AY, Schmitz J. Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, The Netherlands: STW. 2007. p. 603-607