Abstract
A buried injector, which is biased by means of punch-through, can be used in substrate hot electron injection EEPROM devices [1]. In order to optimize this device an empirical expression for the injection probability as a function of the effective barrier height and the average electron energy is proposed and verified by measurements on a variety of devices.
Original language | English |
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Pages (from-to) | 65-68 |
Journal | Microelectronic engineering |
Volume | 15 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 1991 |
Event | 21st European Solid State Device Research Conference, ESSDERC 1991 - Montreux, Switzerland Duration: 16 Sept 1991 → 19 Sept 1991 Conference number: 21 |