Modelling & analysis of the MOCVD-process

V.A.C. Haanappel, H.D. van Corbach, T. Fransen, P.J. Gellings

Research output: Contribution to journal › Article › Academic

Original language	Undefined
Pages (from-to)	127-138
Number of pages	12
Journal	High temperature materials and processes
Volume	12
Issue number	3
Publication status	Published - 1993

Keywords

@article{55e23c714ada477baf903d0059d65c0f,

title = "Modelling & analysis of the MOCVD-process",

keywords = "METIS-105502",

author = "V.A.C. Haanappel and {van Corbach}, H.D. and T. Fransen and P.J. Gellings",

year = "1993",

language = "Undefined",

volume = "12",

pages = "127--138",

journal = "High temperature materials and processes",

issn = "0334-6455",

publisher = "Walter de Gruyter",

number = "3",

}