Modelling and simulation of the quasi static behaviour of silicon condenser microphones

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationSixth Workshop on Micromachining Micromechanics and Mircosystems (MME '95)
    Place of PublicationCopenhagen, Denmark
    Pages209-212
    Publication statusPublished - 3 May 1995
    Event6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark
    Duration: 3 Sep 19955 Sep 1995
    Conference number: 6

    Conference

    Conference6th Micromechanics Europe Workshop, MME 1995
    Abbreviated titleMME
    CountryDenmark
    CityCopenhagen
    Period3/09/955/09/95

    Cite this

    Pedersen, M., Olthuis, W., & Bergveld, P. (1995). Modelling and simulation of the quasi static behaviour of silicon condenser microphones. In Sixth Workshop on Micromachining Micromechanics and Mircosystems (MME '95) (pp. 209-212). Copenhagen, Denmark.