Modelling of a micro Coriolis mass flow sensor for sensitivity improvement

Jarno Groenesteijn; Bert van de Ridder; Joost Conrad Lötters; Remco J. Wiegerink

Modelling of a micro Coriolis mass flow sensor for sensitivity improvement

Jarno Groenesteijn, Bert van de Ridder, Joost Conrad Lötters, Remco J. Wiegerink

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Abstract

We have developed a multi-axis flexible body model with which we can investigate the behavior of (micro) Coriolis mass flow sensors with arbitrary channel geometry. The model has been verified by measurements on five different designs of micro Coriolis mass flow sensors. The model predicts the Eigen frequency of the first two modes within 10% when the sensor tube is filled with air, water or iso-propyl alcohol. The complex shape and high aspect ratio of the micro channels do not allow conventional FEM modelling. Instead the Matlab package SPACAR is used, which allows to model the sensor with a limited number of elements, providing fast and accurate numerical computations. This allows optimization of channel geometry and positioning of the sensing structures. The model can also be applied to other resonating structures.

Original language	Undefined
Pages	954-957
Number of pages	4
Publication status	Published - 4 Nov 2014
Event	2014 IEEE Sensors - Valencia Conference Centre, Valencia, Spain Duration: 2 Nov 2014 → 5 Nov 2014 http://ieee-sensors2014.org/

Conference

Conference	2014 IEEE Sensors
Country/Territory	Spain
City	Valencia
Period	2/11/14 → 5/11/14
Internet address	http://ieee-sensors2014.org/

Keywords

IR-92825
flexible body model
EWI-24184
Coriolis mass flow sensor

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Cite this

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title = "Modelling of a micro Coriolis mass flow sensor for sensitivity improvement",

abstract = "We have developed a multi-axis flexible body model with which we can investigate the behavior of (micro) Coriolis mass flow sensors with arbitrary channel geometry. The model has been verified by measurements on five different designs of micro Coriolis mass flow sensors. The model predicts the Eigen frequency of the first two modes within 10% when the sensor tube is filled with air, water or iso-propyl alcohol. The complex shape and high aspect ratio of the micro channels do not allow conventional FEM modelling. Instead the Matlab package SPACAR is used, which allows to model the sensor with a limited number of elements, providing fast and accurate numerical computations. This allows optimization of channel geometry and positioning of the sensing structures. The model can also be applied to other resonating structures.",

keywords = "IR-92825, flexible body model, EWI-24184, Coriolis mass flow sensor",

author = "Jarno Groenesteijn and {van de Ridder}, Bert and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",

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T1 - Modelling of a micro Coriolis mass flow sensor for sensitivity improvement

AU - Groenesteijn, Jarno

AU - van de Ridder, Bert

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

N1 - http://ieee-sensors2014.org/

PY - 2014/11/4

Y1 - 2014/11/4

N2 - We have developed a multi-axis flexible body model with which we can investigate the behavior of (micro) Coriolis mass flow sensors with arbitrary channel geometry. The model has been verified by measurements on five different designs of micro Coriolis mass flow sensors. The model predicts the Eigen frequency of the first two modes within 10% when the sensor tube is filled with air, water or iso-propyl alcohol. The complex shape and high aspect ratio of the micro channels do not allow conventional FEM modelling. Instead the Matlab package SPACAR is used, which allows to model the sensor with a limited number of elements, providing fast and accurate numerical computations. This allows optimization of channel geometry and positioning of the sensing structures. The model can also be applied to other resonating structures.

AB - We have developed a multi-axis flexible body model with which we can investigate the behavior of (micro) Coriolis mass flow sensors with arbitrary channel geometry. The model has been verified by measurements on five different designs of micro Coriolis mass flow sensors. The model predicts the Eigen frequency of the first two modes within 10% when the sensor tube is filled with air, water or iso-propyl alcohol. The complex shape and high aspect ratio of the micro channels do not allow conventional FEM modelling. Instead the Matlab package SPACAR is used, which allows to model the sensor with a limited number of elements, providing fast and accurate numerical computations. This allows optimization of channel geometry and positioning of the sensing structures. The model can also be applied to other resonating structures.

KW - IR-92825

KW - flexible body model

KW - EWI-24184

KW - Coriolis mass flow sensor

M3 - Paper

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EP - 957

T2 - 2014 IEEE Sensors

Y2 - 2 November 2014 through 5 November 2014

ER -