TY - JOUR
T1 - Modified CVD of nanoscale structures in and EVD of thin layers on porous ceramic membranes
AU - de Haart, L.G.J.
AU - Lin, Y.S.
AU - de Vries, K.J.
AU - Burggraaf, A.J.
PY - 1991
Y1 - 1991
N2 - Experiments on the modified chemical vapour deposition (CVD) and the electrochemical vapour deposition (EVD) of yttria-stabilized zirconia on porous substrates are reported. It is shown that, in the CVD stage, deposition occurs in a small (<20 um) region at the edge of the substrate, very likely leading to pore narrowing. This result illustrates the feasibility of the CVD technique for the modification of ceramic membranes to the (sub)nanometer scale. Film growth in the EVD stage is shown to be controlled by the inpore diffusion of the oxygen source reactant for short (<5 h) deposition times. The yttria to zirconia ratio in the deposited film is determined by the ratio present in the vapour phase. Very thin (<2 um) films can be deposited, which have a potential application in solid oxide fuel cells.
AB - Experiments on the modified chemical vapour deposition (CVD) and the electrochemical vapour deposition (EVD) of yttria-stabilized zirconia on porous substrates are reported. It is shown that, in the CVD stage, deposition occurs in a small (<20 um) region at the edge of the substrate, very likely leading to pore narrowing. This result illustrates the feasibility of the CVD technique for the modification of ceramic membranes to the (sub)nanometer scale. Film growth in the EVD stage is shown to be controlled by the inpore diffusion of the oxygen source reactant for short (<5 h) deposition times. The yttria to zirconia ratio in the deposited film is determined by the ratio present in the vapour phase. Very thin (<2 um) films can be deposited, which have a potential application in solid oxide fuel cells.
U2 - 10.1016/0955-2219(91)90093-F
DO - 10.1016/0955-2219(91)90093-F
M3 - Article
VL - 8
SP - 59
EP - 70
JO - Journal of the European Ceramic Society
JF - Journal of the European Ceramic Society
SN - 0955-2219
IS - 1
ER -