Modular concept for fluid handling systems: a demonstrator micro analysis system

T.S.J. Lammerink; V.L. Spiering; M.C. Elwenspoek; J.H.J. Fluitman; A. van den Berg

doi:10.1109/MEMSYS.1996.494013

Modular concept for fluid handling systems: a demonstrator micro analysis system

T.S.J. Lammerink, V.L. Spiering, M.C. Elwenspoek, J.H.J. Fluitman, A. van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

48 Citations (Scopus)

194 Downloads (Pure)

Abstract

A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics.

Original language	English
Title of host publication	Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	389-394
Number of pages	6
ISBN (Print)	0-7803-2985-6
DOIs	https://doi.org/10.1109/MEMSYS.1996.494013
Publication status	Published - 11 Feb 1996
Event	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States Duration: 11 Feb 1996 → 15 Feb 1996 Conference number: 9

Workshop

Workshop	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
Abbreviated title	MEMS
Country/Territory	United States
City	San Diego
Period	11/02/96 → 15/02/96

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10.1109/MEMSYS.1996.494013

Lammerink1996modularFinal published version, 942 KB

Cite this

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title = "Modular concept for fluid handling systems: a demonstrator micro analysis system",

abstract = "A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics.",

author = "T.S.J. Lammerink and V.L. Spiering and M.C. Elwenspoek and J.H.J. Fluitman and {van den Berg}, A.",

year = "1996",

month = feb,

day = "11",

doi = "10.1109/MEMSYS.1996.494013",

language = "English",

isbn = "0-7803-2985-6",

pages = "389--394",

booktitle = "Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996",

publisher = "IEEE",

address = "United States",

note = "9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, MEMS ; Conference date: 11-02-1996 Through 15-02-1996",

}

Lammerink, TSJ, Spiering, VL, Elwenspoek, MC, Fluitman, JHJ & van den Berg, A 1996, Modular concept for fluid handling systems: a demonstrator micro analysis system. in Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996. IEEE, Piscataway, NJ, pp. 389-394, 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, California, United States, 11/02/96. https://doi.org/10.1109/MEMSYS.1996.494013

Modular concept for fluid handling systems: a demonstrator micro analysis system. / Lammerink, T.S.J.; Spiering, V.L.; Elwenspoek, M.C. et al.
Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996. Piscataway, NJ: IEEE, 1996. p. 389-394.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Modular concept for fluid handling systems

T2 - 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996

AU - Lammerink, T.S.J.

AU - Spiering, V.L.

AU - Elwenspoek, M.C.

AU - Fluitman, J.H.J.

AU - van den Berg, A.

N1 - Conference code: 9

PY - 1996/2/11

Y1 - 1996/2/11

N2 - A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics.

AB - A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics.

U2 - 10.1109/MEMSYS.1996.494013

DO - 10.1109/MEMSYS.1996.494013

M3 - Conference contribution

SN - 0-7803-2985-6

SP - 389

EP - 394

BT - Proceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996

PB - IEEE

CY - Piscataway, NJ

Y2 - 11 February 1996 through 15 February 1996

ER -

Modular concept for fluid handling systems: a demonstrator micro analysis system

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