Modular concept for fluid handling systems: a demonstrator micro analysis system

T.S.J. Lammerink, V.L. Spiering, M.C. Elwenspoek, J.H.J. Fluitman, A. van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    41 Citations (Scopus)
    100 Downloads (Pure)

    Abstract

    A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics.
    Original languageEnglish
    Title of host publicationProceedings of the 9th Annual International Workshop on Micro Electro Mechanical Systems 1996
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages389-394
    Number of pages6
    ISBN (Print)0-7803-2985-6
    DOIs
    Publication statusPublished - 11 Feb 1996
    Event9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States
    Duration: 11 Feb 199615 Feb 1996
    Conference number: 9

    Workshop

    Workshop9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
    Abbreviated titleMEMS
    Country/TerritoryUnited States
    CitySan Diego
    Period11/02/9615/02/96

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