TY - GEN
T1 - Modular concept for miniature chemical systems
AU - van den Berg, Albert
AU - Spiering, V.L.
AU - Lammerink, Theodorus S.J.
AU - Elwenspoek, Michael Curt
AU - Bergveld, Piet
PY - 1995/10/30
Y1 - 1995/10/30
M3 - Conference contribution
BT - Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications
PB - NASA
CY - Houston, TX
T2 - International Conference on Integrated Micro/Nanotechnology for Space Applications 1995
Y2 - 30 October 1995 through 3 November 1995
ER -