@inproceedings{0f77a3fadb86446f95c880a85009d07b,
title = "Modular concept for miniature chemical systems",
author = "{van den Berg}, Albert and V.L. Spiering and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt} and Piet Bergveld",
year = "1995",
month = oct,
day = "30",
language = "English",
booktitle = "Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications",
publisher = "National Aeronautics and Space Administration (NASA)",
note = "International Conference on Integrated Micro/Nanotechnology for Space Applications 1995 ; Conference date: 30-10-1995 Through 03-11-1995",
}