Modular concept for miniature chemical systems

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    Miniaturised chemical systems comprise components for fluid manipulation (channels, pumps, valves etc.), (bio)chemical reaction and analysis. We propose a generic concept consisting of a so-called Mixed Circuit Board (MCB) containing both the fluidic channels and electrical circuitry as well as the silicon-based modules. The modules have a standardized connection to the MCB both for fluids as for electrical signals. In- and output modules have connections with capillaries used for liquid chromatography, ensuring the compatibility with this separation technique. The MCB itself consists either of glass-bonded silicon with anisotropically etched channels, but can ultimately be made as plastic component with use of moulding techniques. A number of system components such as a micropump, a capillary connector, a flow sensor, a micromixer (reactor) and a microfilter will be presented. An example of an electrochemical microreactor (microtitrator) will be given, and it will be shown how incorporation of this microreactor in a Micro Total Analysis System (μTAS) improves its performance. Finally a potential future realisation of a more complicated system, a parallel multisystem for chemical processparameter optimisation, will be evaluated.
    Original languageEnglish
    Title of host publicationMicrosystem technology for chemical and biological microreactor
    Subtitle of host publicationpapers of the Workshop on Microsystem Technology, Mainz, 20-21 February, 1995
    Place of PublicationFrankfurt am Main
    ISBN (Print)3-527-10226-4
    Publication statusPublished - 1995
    EventWorkshop on Microsystems Technology 1995 - Mainz, Germany
    Duration: 20 Feb 199521 Feb 1995

    Publication series

    NameDECHEMA Monographs


    WorkshopWorkshop on Microsystems Technology 1995


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