Modular setup for a miniaturized chemical analysis system

Bart H. van der Schoot*, Sylvain Jeanneret, Albert van den Berg, Nico F. de Rooij

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

28 Citations (Scopus)
4 Downloads (Pure)

Abstract

A miniaturized system for chemical analysis is presented, based on two piezo-electrically driven silicon micropumps and an ISFET-based flow through cell for the measurement of ion concentrations. The active elements of the system are stacked together and measure only 22 × 22 × 11 mm in total. The modular approach allows for great flexibility in the setup of the system.

Original languageEnglish
Pages (from-to)211-213
Number of pages3
JournalSensors and Actuators: B. Chemical
Volume15
Issue number1-3
DOIs
Publication statusPublished - 1 Jan 1993
Externally publishedYes

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