Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

M. Bayraktar, Fei Liu, H.M.J. Bastiaens, C. Bruineman, B. Vratzov, F. Bijkerk

Research output: Contribution to conferencePosterAcademic

15 Downloads (Pure)
Original languageEnglish
Number of pages1
Publication statusPublished - 7 Nov 2018
Event2018 Source Workshop - HiLASE, Prague, Czech Republic
Duration: 5 Nov 20187 Nov 2018
https://euvlitho.com/source-workshop/2018-source-workshop/

Workshop

Workshop2018 Source Workshop
Country/TerritoryCzech Republic
CityPrague
Period5/11/187/11/18
Internet address

Cite this