Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

Muharrem Bayraktar, Fei Liu, Hubertus M.J. Bastiaens, C. Bruineman, Boris Vratzov, F. Bijkerk

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 7 Nov 2018
Event2018 Source Workshop - HiLASE, Prague, Czech Republic
Duration: 5 Nov 20187 Nov 2018
https://euvlitho.com/source-workshop/2018-source-workshop/

Workshop

Workshop2018 Source Workshop
CountryCzech Republic
CityPrague
Period5/11/187/11/18
Internet address

Cite this

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B., & Bijkerk, F. (2018). Monitoring EUV and DUV spectral emission ratios of a high power EUVL source. Poster session presented at 2018 Source Workshop, Prague, Czech Republic.
Bayraktar, Muharrem ; Liu, Fei ; Bastiaens, Hubertus M.J. ; Bruineman, C. ; Vratzov, Boris ; Bijkerk, F. / Monitoring EUV and DUV spectral emission ratios of a high power EUVL source. Poster session presented at 2018 Source Workshop, Prague, Czech Republic.
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title = "Monitoring EUV and DUV spectral emission ratios of a high power EUVL source",
author = "Muharrem Bayraktar and Fei Liu and Bastiaens, {Hubertus M.J.} and C. Bruineman and Boris Vratzov and F. Bijkerk",
year = "2018",
month = "11",
day = "7",
language = "English",
note = "2018 Source Workshop ; Conference date: 05-11-2018 Through 07-11-2018",
url = "https://euvlitho.com/source-workshop/2018-source-workshop/",

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Bayraktar, M, Liu, F, Bastiaens, HMJ, Bruineman, C, Vratzov, B & Bijkerk, F 2018, 'Monitoring EUV and DUV spectral emission ratios of a high power EUVL source' 2018 Source Workshop, Prague, Czech Republic, 5/11/18 - 7/11/18, .

Monitoring EUV and DUV spectral emission ratios of a high power EUVL source. / Bayraktar, Muharrem ; Liu, Fei; Bastiaens, Hubertus M.J.; Bruineman, C.; Vratzov, Boris; Bijkerk, F.

2018. Poster session presented at 2018 Source Workshop, Prague, Czech Republic.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

AU - Bayraktar, Muharrem

AU - Liu, Fei

AU - Bastiaens, Hubertus M.J.

AU - Bruineman, C.

AU - Vratzov, Boris

AU - Bijkerk, F.

PY - 2018/11/7

Y1 - 2018/11/7

M3 - Poster

ER -

Bayraktar M, Liu F, Bastiaens HMJ, Bruineman C, Vratzov B, Bijkerk F. Monitoring EUV and DUV spectral emission ratios of a high power EUVL source. 2018. Poster session presented at 2018 Source Workshop, Prague, Czech Republic.