Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

Muharrem Bayraktar, Fei Liu, Hubertus M.J. Bastiaens, C. Bruineman, Boris Vratzov, F. Bijkerk

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 7 Nov 2018
Event2018 Source Workshop - HiLASE, Prague, Czech Republic
Duration: 5 Nov 20187 Nov 2018
https://euvlitho.com/source-workshop/2018-source-workshop/

Workshop

Workshop2018 Source Workshop
CountryCzech Republic
CityPrague
Period5/11/187/11/18
Internet address

Cite this

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B., & Bijkerk, F. (2018). Monitoring EUV and DUV spectral emission ratios of a high power EUVL source. Poster session presented at 2018 Source Workshop, Prague, Czech Republic.