Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

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Original language	English
Number of pages	1
Publication status	Published - 7 Nov 2018
Event	2018 Source Workshop - HiLASE, Prague, Czech Republic Duration: 5 Nov 2018 → 7 Nov 2018 https://euvlitho.com/source-workshop/2018-source-workshop/

Workshop	2018 Source Workshop
Country/Territory	Czech Republic
City	Prague
Period	5/11/18 → 7/11/18
Internet address	https://euvlitho.com/source-workshop/2018-source-workshop/

Access to Document

@conference{3bb97ff55a9b4c89b96bef5e421f2fad,

title = "Monitoring EUV and DUV spectral emission ratios of a high power EUVL source",

author = "M. Bayraktar and Fei Liu and H.M.J. Bastiaens and C. Bruineman and B. Vratzov and F. Bijkerk",

year = "2018",

month = nov,

day = "7",

language = "English",

note = "2018 Source Workshop ; Conference date: 05-11-2018 Through 07-11-2018",

url = "https://euvlitho.com/source-workshop/2018-source-workshop/",

}