Monitoring of Meniscus Motion at Nozzle Orifice with Capacitive Sensor for Inkjet Applications

Jia Wei; Chao Yue; Guoqi Zhang; Pasqualina M. Sarro; Johan Frederik Dijksman

doi:10.1109/ICSENS.2012.6411187

Monitoring of Meniscus Motion at Nozzle Orifice with Capacitive Sensor for Inkjet Applications

Jia Wei, Chao Yue, Guoqi Zhang, Pasqualina M. Sarro, Johan Frederik Dijksman

Physics of Fluids

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

Abstract

This paper reports a capacitive sensor system to monitor the meniscus motion during the droplet generation at a nozzle orifice for inkjet applications. As the nominal capacitance value of the sensor is at only fF-level with an expected resolution of about 10 aF, suppression of the parasitic components and reduction of the electrical noise are extremely relevant. The sensor is fabricated with a bulk micromachining process and a CMOS readout chip is designed to achieve a compact system. The sensor and the readout are assembled on a piezoelectric inkjet nozzle, and a dedicated measurement setup has been built. The meniscus motion during the generation of water droplets from an inkjet nozzle is successfully recorded as an output waveform for a time period of 900 μs. The amplitude and time of the maximum sensor output (500mV) is captured, and the oscillatory motion of the meniscus after the jetting is recorded as well. The recorded sensor output is consistent with the optical observation of the droplet formation. The detected motion can be used for in-situ diagnosis and feedback control of jetting system for better accuracy and reliability.

Original language	English
Title of host publication	IEEE sensors 2012
Place of Publication	Taipei, Taiwan
Number of pages	4
ISBN (Electronic)	978-1-4577-1767-3, 978-1-4577-1765-9
DOIs	https://doi.org/10.1109/ICSENS.2012.6411187
Publication status	Published - 28 Oct 2012
Event	2012 IEEE Sensors - Taipei International Convention Center, Taipei, Taiwan, Province of China Duration: 28 Oct 2012 → 31 Oct 2012

Conference

Conference	2012 IEEE Sensors
Country	Taiwan, Province of China
City	Taipei
Period	28/10/12 → 31/10/12

Keywords

METIS-293517
IR-85026

Access to Document

10.1109/ICSENS.2012.6411187

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Cite this

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title = "Monitoring of Meniscus Motion at Nozzle Orifice with Capacitive Sensor for Inkjet Applications",

abstract = "This paper reports a capacitive sensor system to monitor the meniscus motion during the droplet generation at a nozzle orifice for inkjet applications. As the nominal capacitance value of the sensor is at only fF-level with an expected resolution of about 10 aF, suppression of the parasitic components and reduction of the electrical noise are extremely relevant. The sensor is fabricated with a bulk micromachining process and a CMOS readout chip is designed to achieve a compact system. The sensor and the readout are assembled on a piezoelectric inkjet nozzle, and a dedicated measurement setup has been built. The meniscus motion during the generation of water droplets from an inkjet nozzle is successfully recorded as an output waveform for a time period of 900 μs. The amplitude and time of the maximum sensor output (500mV) is captured, and the oscillatory motion of the meniscus after the jetting is recorded as well. The recorded sensor output is consistent with the optical observation of the droplet formation. The detected motion can be used for in-situ diagnosis and feedback control of jetting system for better accuracy and reliability.",

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author = "Jia Wei and Chao Yue and Guoqi Zhang and Sarro, {Pasqualina M.} and Dijksman, {Johan Frederik}",

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AU - Wei, Jia

AU - Yue, Chao

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AU - Sarro, Pasqualina M.

AU - Dijksman, Johan Frederik

PY - 2012/10/28

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N2 - This paper reports a capacitive sensor system to monitor the meniscus motion during the droplet generation at a nozzle orifice for inkjet applications. As the nominal capacitance value of the sensor is at only fF-level with an expected resolution of about 10 aF, suppression of the parasitic components and reduction of the electrical noise are extremely relevant. The sensor is fabricated with a bulk micromachining process and a CMOS readout chip is designed to achieve a compact system. The sensor and the readout are assembled on a piezoelectric inkjet nozzle, and a dedicated measurement setup has been built. The meniscus motion during the generation of water droplets from an inkjet nozzle is successfully recorded as an output waveform for a time period of 900 μs. The amplitude and time of the maximum sensor output (500mV) is captured, and the oscillatory motion of the meniscus after the jetting is recorded as well. The recorded sensor output is consistent with the optical observation of the droplet formation. The detected motion can be used for in-situ diagnosis and feedback control of jetting system for better accuracy and reliability.

AB - This paper reports a capacitive sensor system to monitor the meniscus motion during the droplet generation at a nozzle orifice for inkjet applications. As the nominal capacitance value of the sensor is at only fF-level with an expected resolution of about 10 aF, suppression of the parasitic components and reduction of the electrical noise are extremely relevant. The sensor is fabricated with a bulk micromachining process and a CMOS readout chip is designed to achieve a compact system. The sensor and the readout are assembled on a piezoelectric inkjet nozzle, and a dedicated measurement setup has been built. The meniscus motion during the generation of water droplets from an inkjet nozzle is successfully recorded as an output waveform for a time period of 900 μs. The amplitude and time of the maximum sensor output (500mV) is captured, and the oscillatory motion of the meniscus after the jetting is recorded as well. The recorded sensor output is consistent with the optical observation of the droplet formation. The detected motion can be used for in-situ diagnosis and feedback control of jetting system for better accuracy and reliability.

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