Abstract
| Original language | English |
|---|---|
| Title of host publication | IEEE sensors 2012 |
| Place of Publication | Taipei, Taiwan |
| Number of pages | 4 |
| ISBN (Electronic) | 978-1-4577-1767-3, 978-1-4577-1765-9 |
| DOIs | |
| Publication status | Published - 28 Oct 2012 |
| Event | 2012 IEEE Sensors - Taipei International Convention Center, Taipei, Taiwan, Province of China Duration: 28 Oct 2012 → 31 Oct 2012 |
Conference
| Conference | 2012 IEEE Sensors |
|---|---|
| Country | Taiwan, Province of China |
| City | Taipei |
| Period | 28/10/12 → 31/10/12 |
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Keywords
- METIS-293517
- IR-85026
Cite this
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Monitoring of Meniscus Motion at Nozzle Orifice with Capacitive Sensor for Inkjet Applications. / Wei, Jia; Yue, Chao; Zhang, Guoqi; Sarro, Pasqualina M.; Dijksman, Johan Frederik.
IEEE sensors 2012. Taipei, Taiwan, 2012.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Monitoring of Meniscus Motion at Nozzle Orifice with Capacitive Sensor for Inkjet Applications
AU - Wei, Jia
AU - Yue, Chao
AU - Zhang, Guoqi
AU - Sarro, Pasqualina M.
AU - Dijksman, Johan Frederik
PY - 2012/10/28
Y1 - 2012/10/28
N2 - This paper reports a capacitive sensor system to monitor the meniscus motion during the droplet generation at a nozzle orifice for inkjet applications. As the nominal capacitance value of the sensor is at only fF-level with an expected resolution of about 10 aF, suppression of the parasitic components and reduction of the electrical noise are extremely relevant. The sensor is fabricated with a bulk micromachining process and a CMOS readout chip is designed to achieve a compact system. The sensor and the readout are assembled on a piezoelectric inkjet nozzle, and a dedicated measurement setup has been built. The meniscus motion during the generation of water droplets from an inkjet nozzle is successfully recorded as an output waveform for a time period of 900 μs. The amplitude and time of the maximum sensor output (500mV) is captured, and the oscillatory motion of the meniscus after the jetting is recorded as well. The recorded sensor output is consistent with the optical observation of the droplet formation. The detected motion can be used for in-situ diagnosis and feedback control of jetting system for better accuracy and reliability.
AB - This paper reports a capacitive sensor system to monitor the meniscus motion during the droplet generation at a nozzle orifice for inkjet applications. As the nominal capacitance value of the sensor is at only fF-level with an expected resolution of about 10 aF, suppression of the parasitic components and reduction of the electrical noise are extremely relevant. The sensor is fabricated with a bulk micromachining process and a CMOS readout chip is designed to achieve a compact system. The sensor and the readout are assembled on a piezoelectric inkjet nozzle, and a dedicated measurement setup has been built. The meniscus motion during the generation of water droplets from an inkjet nozzle is successfully recorded as an output waveform for a time period of 900 μs. The amplitude and time of the maximum sensor output (500mV) is captured, and the oscillatory motion of the meniscus after the jetting is recorded as well. The recorded sensor output is consistent with the optical observation of the droplet formation. The detected motion can be used for in-situ diagnosis and feedback control of jetting system for better accuracy and reliability.
KW - METIS-293517
KW - IR-85026
U2 - 10.1109/ICSENS.2012.6411187
DO - 10.1109/ICSENS.2012.6411187
M3 - Conference contribution
SN - 978-1-4577-1766-6
BT - IEEE sensors 2012
CY - Taipei, Taiwan
ER -