Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106

Edward Bernhardi, Q. Lu, Hendricus A.G.M. van Wolferen, Kerstin Worhoff, R.M. de Ridder, Markus Pollnau

Research output: Contribution to journalArticleAcademicpeer-review

31 Citations (Scopus)

Abstract

>The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.
Original languageUndefined
Pages (from-to)225-234
Number of pages35
JournalPhotonics and nanostructures
Volume9
Issue number3
DOIs
Publication statusPublished - 16 Mar 2011

Keywords

  • METIS-277580
  • EWI-19799
  • IR-76404

Cite this

Bernhardi, Edward ; Lu, Q. ; van Wolferen, Hendricus A.G.M. ; Worhoff, Kerstin ; de Ridder, R.M. ; Pollnau, Markus. / Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106. In: Photonics and nanostructures. 2011 ; Vol. 9, No. 3. pp. 225-234.
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Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106. / Bernhardi, Edward; Lu, Q.; van Wolferen, Hendricus A.G.M.; Worhoff, Kerstin; de Ridder, R.M.; Pollnau, Markus.

In: Photonics and nanostructures, Vol. 9, No. 3, 16.03.2011, p. 225-234.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106

AU - Bernhardi, Edward

AU - Lu, Q.

AU - van Wolferen, Hendricus A.G.M.

AU - Worhoff, Kerstin

AU - de Ridder, R.M.

AU - Pollnau, Markus

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PY - 2011/3/16

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N2 - >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.

AB - >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.

KW - METIS-277580

KW - EWI-19799

KW - IR-76404

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DO - 10.1016/j.photonics.2011.03.001

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