Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106

Edward Bernhardi, Q. Lu, Hendricus A.G.M. van Wolferen, Kerstin Worhoff, R.M. de Ridder, Markus Pollnau

    Research output: Contribution to journalArticleAcademicpeer-review

    31 Citations (Scopus)

    Abstract

    >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.
    Original languageUndefined
    Pages (from-to)225-234
    Number of pages35
    JournalPhotonics and nanostructures
    Volume9
    Issue number3
    DOIs
    Publication statusPublished - 16 Mar 2011

    Keywords

    • METIS-277580
    • EWI-19799
    • IR-76404

    Cite this

    Bernhardi, Edward ; Lu, Q. ; van Wolferen, Hendricus A.G.M. ; Worhoff, Kerstin ; de Ridder, R.M. ; Pollnau, Markus. / Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106. In: Photonics and nanostructures. 2011 ; Vol. 9, No. 3. pp. 225-234.
    @article{e5def50ec8ea4a9e8b84d7cc52ccdcd4,
    title = "Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106",
    abstract = ">The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99{\%}. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.",
    keywords = "METIS-277580, EWI-19799, IR-76404",
    author = "Edward Bernhardi and Q. Lu and {van Wolferen}, {Hendricus A.G.M.} and Kerstin Worhoff and {de Ridder}, R.M. and Markus Pollnau",
    note = "10.1016/j.photonics.2011.03.001",
    year = "2011",
    month = "3",
    day = "16",
    doi = "10.1016/j.photonics.2011.03.001",
    language = "Undefined",
    volume = "9",
    pages = "225--234",
    journal = "Photonics and nanostructures",
    issn = "1569-4410",
    publisher = "Elsevier",
    number = "3",

    }

    Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106. / Bernhardi, Edward; Lu, Q.; van Wolferen, Hendricus A.G.M.; Worhoff, Kerstin; de Ridder, R.M.; Pollnau, Markus.

    In: Photonics and nanostructures, Vol. 9, No. 3, 16.03.2011, p. 225-234.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106

    AU - Bernhardi, Edward

    AU - Lu, Q.

    AU - van Wolferen, Hendricus A.G.M.

    AU - Worhoff, Kerstin

    AU - de Ridder, R.M.

    AU - Pollnau, Markus

    N1 - 10.1016/j.photonics.2011.03.001

    PY - 2011/3/16

    Y1 - 2011/3/16

    N2 - >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.

    AB - >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.

    KW - METIS-277580

    KW - EWI-19799

    KW - IR-76404

    U2 - 10.1016/j.photonics.2011.03.001

    DO - 10.1016/j.photonics.2011.03.001

    M3 - Article

    VL - 9

    SP - 225

    EP - 234

    JO - Photonics and nanostructures

    JF - Photonics and nanostructures

    SN - 1569-4410

    IS - 3

    ER -