Abstract
| Original language | Undefined |
|---|---|
| Pages (from-to) | 225-234 |
| Number of pages | 35 |
| Journal | Photonics and nanostructures |
| Volume | 9 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 16 Mar 2011 |
Keywords
- METIS-277580
- EWI-19799
- IR-76404
Cite this
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Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106. / Bernhardi, Edward; Lu, Q.; van Wolferen, Hendricus A.G.M.; Worhoff, Kerstin; de Ridder, R.M.; Pollnau, Markus.
In: Photonics and nanostructures, Vol. 9, No. 3, 16.03.2011, p. 225-234.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding 106
AU - Bernhardi, Edward
AU - Lu, Q.
AU - van Wolferen, Hendricus A.G.M.
AU - Worhoff, Kerstin
AU - de Ridder, R.M.
AU - Pollnau, Markus
N1 - 10.1016/j.photonics.2011.03.001
PY - 2011/3/16
Y1 - 2011/3/16
N2 - >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.
AB - >The design, fabrication, and characterization of surface relief Bragg gratings integrated with aluminum oxide ridge waveguides are reported. After patterning a photoresist layer by laser interference lithography, uniform gratings with a depth of 120 nm and a period of 507 nm were etched into the SiO$_2$ top cladding. The grating length varied between 1.25 mm and 4.75 mm. The grating-induced loss was 0.08 ± 0.01 dB/cm, while the maximum grating reflectivity exceeded 99%. These values enabled the realization of monolithic distributed Bragg reflector cavities with finesse up to 147 and quality factors of more than 1E6. The measured performance agrees very well with predictions based on coupled mode theory.
KW - METIS-277580
KW - EWI-19799
KW - IR-76404
U2 - 10.1016/j.photonics.2011.03.001
DO - 10.1016/j.photonics.2011.03.001
M3 - Article
VL - 9
SP - 225
EP - 234
JO - Photonics and nanostructures
JF - Photonics and nanostructures
SN - 1569-4410
IS - 3
ER -