Monolithic fiber-top sensor for critical environments and standard applications

D. Iannuzzi, S. Deladi, V.J. Gadgil, R.G.P. Sanders, H. Schreuders, M.C. Elwenspoek

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    66 Citations (Scopus)
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    Abstract

    We present a monolithic device obtained by carving a cantilever on the top of a single-mode optical fiber. We show that the vertical position of the cantilever can be determined with accuracy comparable to atomic force microscopes and other commonly used scientific instruments. The device does not require any alignment procedure and can be used in critical environments as well as in standard applications.
    Original languageEnglish
    Article number053501
    Number of pages3
    JournalApplied physics letters
    Volume88
    Issue number5
    DOIs
    Publication statusPublished - 30 Jan 2006

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