Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

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    Abstract

    Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.
    Original languageUndefined
    Title of host publicationProceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages451-454
    Number of pages4
    ISBN (Print)88-900847-8-2
    Publication statusPublished - 17 Oct 2002
    Event32nd European Solid-State Device Research Conference, ESSDERC 2002 - Firenze, Italy
    Duration: 24 Sep 200226 Sep 2002
    Conference number: 32

    Conference

    Conference32nd European Solid-State Device Research Conference, ESSDERC 2002
    Abbreviated titleESSDERC
    CountryItaly
    CityFirenze
    Period24/09/0226/09/02

    Keywords

    • EWI-15596
    • METIS-207490
    • IR-43819

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