Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

P. Le Minh; J. Holleman; Johan W. Berenschot; Niels Roelof Tas; Albert van den Berg

Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.

Original language	Undefined
Title of host publication	Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002
Place of Publication	Piscataway
Publisher	IEEE
Pages	451-454
Number of pages	4
ISBN (Print)	88-900847-8-2
Publication status	Published - 17 Oct 2002
Event	32nd European Solid-State Device Research Conference, ESSDERC 2002 - Firenze, Italy Duration: 24 Sept 2002 → 26 Sept 2002 Conference number: 32

Conference

Conference	32nd European Solid-State Device Research Conference, ESSDERC 2002
Abbreviated title	ESSDERC
Country/Territory	Italy
City	Firenze
Period	24/09/02 → 26/09/02

Keywords

EWI-15596
METIS-207490
IR-43819

Access to Document

http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=1503895

Cite this

Le Minh, P., Holleman, J., Berenschot, J. W., Tas, N. R., & van den Berg, A. (2002). Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002 (pp. 451-454). IEEE. http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=1503895

@inproceedings{7872c22d96fa450a96a7ee320df65efd,

title = "Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector",

abstract = "Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.",

keywords = "EWI-15596, METIS-207490, IR-43819",

author = "\{Le Minh\}, P. and J. Holleman and Berenschot, \{Johan W.\} and Tas, \{Niels Roelof\} and \{van den Berg\}, Albert",

year = "2002",

month = oct,

day = "17",

language = "Undefined",

isbn = "88-900847-8-2",

pages = "451--454",

booktitle = "Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002",

publisher = "IEEE",

address = "United States",

note = "32nd European Solid-State Device Research Conference, ESSDERC 2002 ; Conference date: 24-09-2002 Through 26-09-2002",

}

Le Minh, P, Holleman, J, Berenschot, JW , Tas, NR & van den Berg, A 2002, Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. in Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002. IEEE, Piscataway, pp. 451-454, 32nd European Solid-State Device Research Conference, ESSDERC 2002, Firenze, Italy, 24/09/02. <http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=1503895>

Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. / Le Minh, P.; Holleman, J.; Berenschot, Johan W. et al.
Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002. Piscataway: IEEE, 2002. p. 451-454.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

AU - Le Minh, P.

AU - Holleman, J.

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - van den Berg, Albert

N1 - Conference code: 32

PY - 2002/10/17

Y1 - 2002/10/17

N2 - Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.

AB - Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.

KW - EWI-15596

KW - METIS-207490

KW - IR-43819

M3 - Conference contribution

SN - 88-900847-8-2

SP - 451

EP - 454

BT - Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002

PB - IEEE

CY - Piscataway

T2 - 32nd European Solid-State Device Research Conference, ESSDERC 2002

Y2 - 24 September 2002 through 26 September 2002

ER -