Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Contribution to journalArticleAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    A technology to monolithically integrate micro-bimorph cantilevers equipped with tips that are self-aligned with respect to the holes of a 2D photonic crystal cavity-based channel-drop filter is presented. On electrostatic actuation, the tips move into the holes and provide electromechano-optical modulation of light. The technology allows the fabrication of tips on specific photonic crystal holes by controlling the hole diameter and the sacrificial layer thickness. The integrated device is both mechanically and optically characterized. A 180 pm wavelength shift at the first band edge of the photonic crystal cavity-based channel-drop filter is measured on the application of a 2 V dc voltage to the cantilever. This CMOS-compatible device is designed to operate in the C-band of the telecommunication wavelengths and constitutes a promising candidate for future integrated all-optical devices.
    Original languageUndefined
    Pages (from-to)0740041
    Number of pages6
    JournalJournal of micromechanics and microengineering
    Volume21
    Issue number7
    DOIs
    Publication statusPublished - 23 Jun 2011

    Keywords

    • monolithic integration
    • wavelength tuning
    • self aligned tips
    • EWI-20288
    • TST-ACTUATORS
    • METIS-277696
    • IR-77626
    • Micro-bimorph cantilever
    • electromechano-optical modulation
    • photonic crystal cavity based channel-drop filter

    Cite this

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    title = "Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter",
    abstract = "A technology to monolithically integrate micro-bimorph cantilevers equipped with tips that are self-aligned with respect to the holes of a 2D photonic crystal cavity-based channel-drop filter is presented. On electrostatic actuation, the tips move into the holes and provide electromechano-optical modulation of light. The technology allows the fabrication of tips on specific photonic crystal holes by controlling the hole diameter and the sacrificial layer thickness. The integrated device is both mechanically and optically characterized. A 180 pm wavelength shift at the first band edge of the photonic crystal cavity-based channel-drop filter is measured on the application of a 2 V dc voltage to the cantilever. This CMOS-compatible device is designed to operate in the C-band of the telecommunication wavelengths and constitutes a promising candidate for future integrated all-optical devices.",
    keywords = "monolithic integration, wavelength tuning, self aligned tips, EWI-20288, TST-ACTUATORS, METIS-277696, IR-77626, Micro-bimorph cantilever, electromechano-optical modulation, photonic crystal cavity based channel-drop filter",
    author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",
    note = "10.1088/0960-1317/21/7/074004",
    year = "2011",
    month = "6",
    day = "23",
    doi = "10.1088/0960-1317/21/7/074004",
    language = "Undefined",
    volume = "21",
    pages = "0740041",
    journal = "Journal of micromechanics and microengineering",
    issn = "0960-1317",
    publisher = "IOP Publishing Ltd.",
    number = "7",

    }

    Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; de Ridder, R.M.; Krijnen, Gijsbertus J.M.

    In: Journal of micromechanics and microengineering, Vol. 21, No. 7, 23.06.2011, p. 0740041.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter

    AU - Chakkalakkal Abdulla, S.M.

    AU - Kauppinen, L.J.

    AU - Dijkstra, Mindert

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - de Ridder, R.M.

    AU - Krijnen, Gijsbertus J.M.

    N1 - 10.1088/0960-1317/21/7/074004

    PY - 2011/6/23

    Y1 - 2011/6/23

    N2 - A technology to monolithically integrate micro-bimorph cantilevers equipped with tips that are self-aligned with respect to the holes of a 2D photonic crystal cavity-based channel-drop filter is presented. On electrostatic actuation, the tips move into the holes and provide electromechano-optical modulation of light. The technology allows the fabrication of tips on specific photonic crystal holes by controlling the hole diameter and the sacrificial layer thickness. The integrated device is both mechanically and optically characterized. A 180 pm wavelength shift at the first band edge of the photonic crystal cavity-based channel-drop filter is measured on the application of a 2 V dc voltage to the cantilever. This CMOS-compatible device is designed to operate in the C-band of the telecommunication wavelengths and constitutes a promising candidate for future integrated all-optical devices.

    AB - A technology to monolithically integrate micro-bimorph cantilevers equipped with tips that are self-aligned with respect to the holes of a 2D photonic crystal cavity-based channel-drop filter is presented. On electrostatic actuation, the tips move into the holes and provide electromechano-optical modulation of light. The technology allows the fabrication of tips on specific photonic crystal holes by controlling the hole diameter and the sacrificial layer thickness. The integrated device is both mechanically and optically characterized. A 180 pm wavelength shift at the first band edge of the photonic crystal cavity-based channel-drop filter is measured on the application of a 2 V dc voltage to the cantilever. This CMOS-compatible device is designed to operate in the C-band of the telecommunication wavelengths and constitutes a promising candidate for future integrated all-optical devices.

    KW - monolithic integration

    KW - wavelength tuning

    KW - self aligned tips

    KW - EWI-20288

    KW - TST-ACTUATORS

    KW - METIS-277696

    KW - IR-77626

    KW - Micro-bimorph cantilever

    KW - electromechano-optical modulation

    KW - photonic crystal cavity based channel-drop filter

    U2 - 10.1088/0960-1317/21/7/074004

    DO - 10.1088/0960-1317/21/7/074004

    M3 - Article

    VL - 21

    SP - 0740041

    JO - Journal of micromechanics and microengineering

    JF - Journal of micromechanics and microengineering

    SN - 0960-1317

    IS - 7

    ER -