Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

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