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Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon
Yiping Zhao, Johan W. Berenschot, Henricus V. Jansen, Niels Roelof Tas, Jurriaan Huskens, Michael Curt Elwenspoek
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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