Mo/Si multilayer-coated amplitude division beam splitters for XUV radiation sources

R. Sobierajski, R.A. Loch, Robbert Wilhelmus Elisabeth van de Kruijs, Eric Louis, G. von Blanckenhagen, E.M. Gullikson, F. Siewert, A. Wawro, Frederik Bijkerk

Research output: Contribution to journal › Article › Academic › peer-review

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Physics