Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering

Toine van den Boogaard, Eric Louis, F.A. van Goor, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Jun 2010
Event	11th ASML Technology Conference 2010 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands Duration: 16 Jun 2010 → 16 Jun 2010 Conference number: 11

Conference	11th ASML Technology Conference 2010
Country/Territory	Netherlands
City	Eindhoven
Period	16/06/10 → 16/06/10

Keywords

@conference{6b9ada05d84d41869461c16409841c97,

title = "Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering",

keywords = "METIS-265558",

author = "{van den Boogaard}, Toine and Eric Louis and {van Goor}, F.A. and Frederik Bijkerk",

year = "2010",

month = jun,

day = "16",

language = "Undefined",

pages = "--",

note = "11th ASML Technology Conference 2010 ; Conference date: 16-06-2010 Through 16-06-2010",

}