Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering

Toine van den Boogaard, Eric Louis, F.A. van Goor, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 16 Jun 2010
Event11th ASML Technology Conference 2010 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands
Duration: 16 Jun 201016 Jun 2010
Conference number: 11

Conference

Conference11th ASML Technology Conference 2010
CountryNetherlands
CityEindhoven
Period16/06/1016/06/10

Keywords

  • METIS-265558

Cite this

van den Boogaard, T., Louis, E., van Goor, F. A., & Bijkerk, F. (2010). Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering. -. Poster session presented at 11th ASML Technology Conference 2010, Eindhoven, Netherlands.
van den Boogaard, Toine ; Louis, Eric ; van Goor, F.A. ; Bijkerk, Frederik. / Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering. Poster session presented at 11th ASML Technology Conference 2010, Eindhoven, Netherlands.
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year = "2010",
month = "6",
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language = "Undefined",
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van den Boogaard, T, Louis, E, van Goor, FA & Bijkerk, F 2010, 'Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering' 11th ASML Technology Conference 2010, Eindhoven, Netherlands, 16/06/10 - 16/06/10, pp. -.

Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering. / van den Boogaard, Toine; Louis, Eric; van Goor, F.A.; Bijkerk, Frederik.

2010. - Poster session presented at 11th ASML Technology Conference 2010, Eindhoven, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering

AU - van den Boogaard, Toine

AU - Louis, Eric

AU - van Goor, F.A.

AU - Bijkerk, Frederik

PY - 2010/6/16

Y1 - 2010/6/16

KW - METIS-265558

M3 - Poster

SP - -

ER -

van den Boogaard T, Louis E, van Goor FA, Bijkerk F. Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering. 2010. Poster session presented at 11th ASML Technology Conference 2010, Eindhoven, Netherlands.