Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering

Toine van den Boogaard, Eric Louis, F.A. van Goor, Frederik Bijkerk

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 16 Jun 2010
Event11th ASML Technology Conference 2010 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands
Duration: 16 Jun 201016 Jun 2010
Conference number: 11

Conference

Conference11th ASML Technology Conference 2010
CountryNetherlands
CityEindhoven
Period16/06/1016/06/10

Keywords

  • METIS-265558

Cite this

van den Boogaard, T., Louis, E., van Goor, F. A., & Bijkerk, F. (2010). Mo/Si multilayer coating of grating-like topographies for IR diffractive-filtering. -. Poster session presented at 11th ASML Technology Conference 2010, Eindhoven, Netherlands.