Original language | Undefined |
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Title of host publication | Proceedings of the Second international micromachine symposium |
Place of Publication | Tokyo, Japan |
Pages | 3-11 |
Publication status | Published - 29 Feb 1996 |
Event | Second International Micromachine Symposium - Tokyo, Japan Duration: 31 Oct 1996 → 1 Nov 1996 |
Conference
Conference | Second International Micromachine Symposium |
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Period | 31/10/96 → 1/11/96 |
Other | October 31 - November. 1, 1996 |
Keywords
- IR-16135
- METIS-113020