Multi-layered structure for an EUV Mirror

Viacheslav Medvedev (Inventor), Andrey Yakshin (Inventor), V.M. Krivtsun (Inventor), Frederik Bijkerk (Inventor)

Research output: Patent

Original languageGerman
Patent numberPCT/EP2014/070877
Priority date30/09/14
Publication statusSubmitted - 30 Apr 2015

Keywords

  • IR-103289
  • METIS-310496

Cite this

Medvedev, V., Yakshin, A., Krivtsun, V. M., & Bijkerk, F. (2015). Multi-layered structure for an EUV Mirror. Manuscript submitted for publication. (Patent No. PCT/EP2014/070877).