Multi-layered structure for an EUV Mirror

Viacheslav Medvedev (Inventor), Andrey Yakshin (Inventor), V.M. Krivtsun (Inventor), Frederik Bijkerk (Inventor)

Research output: PatentProfessional

Original languageGerman
Patent numberPCT/EP2014/070877
Priority date30/09/14
Publication statusSubmitted - 30 Apr 2015

Keywords

  • IR-103289
  • METIS-310496

Cite this

Medvedev, V., Yakshin, A., Krivtsun, V. M., & Bijkerk, F. (2015). Multi-layered structure for an EUV Mirror. Manuscript submitted for publication. (Patent No. PCT/EP2014/070877).
Medvedev, Viacheslav (Inventor) ; Yakshin, Andrey (Inventor) ; Krivtsun, V.M. (Inventor) ; Bijkerk, Frederik (Inventor). / Multi-layered structure for an EUV Mirror. Patent No.: PCT/EP2014/070877.
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title = "Multi-layered structure for an EUV Mirror",
keywords = "IR-103289, METIS-310496",
author = "Viacheslav Medvedev and Andrey Yakshin and V.M. Krivtsun and Frederik Bijkerk",
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month = "4",
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language = "German",
type = "Patent",
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Medvedev, V, Yakshin, A, Krivtsun, VM & Bijkerk, F 2015, Multi-layered structure for an EUV Mirror, Patent No. PCT/EP2014/070877.

Multi-layered structure for an EUV Mirror. / Medvedev, Viacheslav (Inventor); Yakshin, Andrey (Inventor); Krivtsun, V.M. (Inventor); Bijkerk, Frederik (Inventor).

Patent No.: PCT/EP2014/070877.

Research output: PatentProfessional

TY - PAT

T1 - Multi-layered structure for an EUV Mirror

AU - Medvedev, Viacheslav

AU - Yakshin, Andrey

AU - Krivtsun, V.M.

AU - Bijkerk, Frederik

PY - 2015/4/30

Y1 - 2015/4/30

KW - IR-103289

KW - METIS-310496

M3 - Patent

M1 - PCT/EP2014/070877

ER -

Medvedev V, Yakshin A, Krivtsun VM, Bijkerk F, inventors. Multi-layered structure for an EUV Mirror. PCT/EP2014/070877. 2015 Apr 30.