| Original language | German |
|---|---|
| Patent number | PCT/EP2014/070877 |
| Priority date | 30/09/14 |
| Publication status | Submitted - 30 Apr 2015 |
Keywords
- IR-103289
- METIS-310496
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Multi-layered structure for an EUV Mirror
- Viacheslav Medvedev (Inventor)
- , Andrey Yakshin (Inventor)
- , V.M. Krivtsun (Inventor)
- , Frederik Bijkerk (Inventor)
Research output: Patent