Multi parameter flow meter for on-line measurement of gas mixture composition

E.J. van der Wouden, Jarno Groenesteijn, Remco J. Wiegerink, Joost Conrad Lötters

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    Abstract

    In this paper we describe the development of a system and model to analyze the composition of gas mixtures up to four components. The system consists of a Coriolis mass flow sensor, density, pressure and thermal flow sensor. With this system it is possible to measure the viscosity, density, heat capacity and flow rate of the medium. In a next step the composition can be analyzed if the constituents of the mixture are known. This makes the approach universally applicable to all gasses as long as the number of components does not exceed the number of measured properties and as long as the properties are measured with a sufficient accuracy. We present measurements with binary and ternary gas mixtures, on compositions that range over an order of magnitude in value for the physical properties. Two platforms for analyses are presented. The first platform consists of sensors realized with MEMS fabrication technology. This approach allows for a system with a high level of integration. With this system we demonstrate a proof of principle for the analyses of binary mixtures with an accuracy of 10%. In the second platform we utilize more mature steel sensor technology to demonstrate the potential of this approach. We show that with this technique, binary mixtures can be measured within 1% and ternary gas mixtures within 3%.
    Original languageUndefined
    Pages (from-to)452-461
    Number of pages10
    JournalMicromachines
    Volume6
    Issue number4
    DOIs
    Publication statusPublished - 10 Apr 2015

    Keywords

    • EWI-26565
    • IR-98711
    • METIS-315098

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