Multi-walled micro channels

R.W. Tjerkstra, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-114637

    Cite this

    Tjerkstra, R. W., Gardeniers, J. G. E., van den Berg, A., & Elwenspoek, M. C. (1998, Jun 23). Multi-walled micro channels. Enschede.