Multi-walled microchannels: free standig porous silicon membranes for use in MicroTAS

R.W. Tjerkstra, Johannes G.E. Gardeniers, J.J. Kelly, Albert van den Berg

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)495-501
    JournalJournal of microelectromechanical systems
    Volume9
    Issue number4
    Publication statusPublished - 2001

    Keywords

    • METIS-203693

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