Multi-walled microchannels: free standig porous silicon membranes for use in MicroTAS

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	495-501
Journal	Journal of microelectromechanical systems
Volume	9
Issue number	4
Publication status	Published - 2001

Keywords

@article{daa59ccf57474b0a89ec12099c5547b4,

title = "Multi-walled microchannels: free standig porous silicon membranes for use in MicroTAS",

keywords = "METIS-203693",

author = "R.W. Tjerkstra and Gardeniers, \{Johannes G.E.\} and J.J. Kelly and \{van den Berg\}, Albert",

year = "2001",

language = "Undefined",

volume = "9",

pages = "495--501",

journal = "Journal of microelectromechanical systems",

issn = "1057-7157",

publisher = "IEEE",

number = "4",

}

TY - JOUR

T1 - Multi-walled microchannels: free standig porous silicon membranes for use in MicroTAS

AU - Tjerkstra, R.W.

AU - Gardeniers, Johannes G.E.

AU - Kelly, J.J.

AU - van den Berg, Albert

PY - 2001

Y1 - 2001

KW - METIS-203693

M3 - Article

SN - 1057-7157

VL - 9

SP - 495

EP - 501

JO - Journal of microelectromechanical systems

JF - Journal of microelectromechanical systems

IS - 4

ER -