Multifunctional tool for expanding afm-based applications

S. Deladi; Niels Roelof Tas; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2005.1496383

Multifunctional tool for expanding afm-based applications

S. Deladi
, Niels Roelof Tas
, Gijsbertus J.M. Krijnen
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

254 Downloads (Pure)

Abstract

A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry).

Original language	Undefined
Title of host publication	13th International Conference on Solid-State Sensors, Actuators and Microsystems
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	159-162
Number of pages	4
ISBN (Print)	0-7803-8994-8
DOIs	https://doi.org/10.1109/SENSOR.2005.1496383
Publication status	Published - 2005
Event	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 Conference number: 13

Publication series

Name	Digest of Technical Papers. TRANSDUCERS '05
Publisher	IEEE Computer Society
Number	05TH8791
Volume	1

Conference

Conference	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005
Abbreviated title	TRANSDUCERS 2005
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

EWI-9919
IR-52578
METIS-224197

Access to Document

10.1109/SENSOR.2005.1496383

Cite this

@inproceedings{eaa752f6e69349fba730a0a15230824b,

title = "Multifunctional tool for expanding afm-based applications",

abstract = "A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry).",

keywords = "EWI-9919, IR-52578, METIS-224197",

author = "S. Deladi and Tas, \{Niels Roelof\} and Krijnen, \{Gijsbertus J.M.\} and Elwenspoek, \{Michael Curt\}",

year = "2005",

doi = "10.1109/SENSOR.2005.1496383",

language = "Undefined",

isbn = "0-7803-8994-8",

series = "Digest of Technical Papers. TRANSDUCERS '05",

publisher = "IEEE",

number = "05TH8791",

pages = "159--162",

booktitle = "13th International Conference on Solid-State Sensors, Actuators and Microsystems",

address = "United States",

note = "13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Deladi, S, Tas, NR , Krijnen, GJM & Elwenspoek, MC 2005, Multifunctional tool for expanding afm-based applications. in 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers. TRANSDUCERS '05, no. 05TH8791, vol. 1, IEEE, Los Alamitos, pp. 159-162, 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496383

Multifunctional tool for expanding afm-based applications. / Deladi, S.; Tas, Niels Roelof ; Krijnen, Gijsbertus J.M. et al.
13th International Conference on Solid-State Sensors, Actuators and Microsystems. Los Alamitos: IEEE, 2005. p. 159-162 (Digest of Technical Papers. TRANSDUCERS '05; Vol. 1, No. 05TH8791).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Multifunctional tool for expanding afm-based applications

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AU - Tas, Niels Roelof

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 13

PY - 2005

Y1 - 2005

N2 - A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry).

AB - A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry).

KW - EWI-9919

KW - IR-52578

KW - METIS-224197

U2 - 10.1109/SENSOR.2005.1496383

DO - 10.1109/SENSOR.2005.1496383

M3 - Conference contribution

SN - 0-7803-8994-8

T3 - Digest of Technical Papers. TRANSDUCERS '05

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EP - 162

BT - 13th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - IEEE

CY - Los Alamitos

T2 - 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005

Y2 - 5 June 2005 through 9 June 2005

ER -