Multilayer filter using the borrmann effect for EUV source monitoring

J. L.P. Barreaux, I.V. Kozhevnikov, H. M.J. Bastiaens, R. W.E. van de Kruijs, F. Bijkerk, K. J. Boller

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationEuropean Conference on Lasers and Electro-Optics, CLEO 2015
PublisherOptical Society of America
ISBN (Print)9781467374750
Publication statusPublished - 21 Jul 2014
EventEuropean Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015 - Munich, Germany
Duration: 21 Jun 201525 Jun 2015
http://2015.cleoeurope.org/

Conference

ConferenceEuropean Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015
Abbreviated titleCLEO/EUROPE-EQEC 2015
CountryGermany
CityMunich
Period21/06/1525/06/15
Internet address

Cite this

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F., & Boller, K. J. (2014). Multilayer filter using the borrmann effect for EUV source monitoring. In European Conference on Lasers and Electro-Optics, CLEO 2015 Optical Society of America.
Barreaux, J. L.P. ; Kozhevnikov, I.V. ; Bastiaens, H. M.J. ; van de Kruijs, R. W.E. ; Bijkerk, F. ; Boller, K. J. / Multilayer filter using the borrmann effect for EUV source monitoring. European Conference on Lasers and Electro-Optics, CLEO 2015. Optical Society of America, 2014.
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title = "Multilayer filter using the borrmann effect for EUV source monitoring",
author = "Barreaux, {J. L.P.} and I.V. Kozhevnikov and Bastiaens, {H. M.J.} and {van de Kruijs}, {R. W.E.} and F. Bijkerk and Boller, {K. J.}",
year = "2014",
month = "7",
day = "21",
language = "English",
isbn = "9781467374750",
booktitle = "European Conference on Lasers and Electro-Optics, CLEO 2015",
publisher = "Optical Society of America",
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}

Barreaux, JLP, Kozhevnikov, IV, Bastiaens, HMJ, van de Kruijs, RWE, Bijkerk, F & Boller, KJ 2014, Multilayer filter using the borrmann effect for EUV source monitoring. in European Conference on Lasers and Electro-Optics, CLEO 2015. Optical Society of America, European Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015, Munich, Germany, 21/06/15.

Multilayer filter using the borrmann effect for EUV source monitoring. / Barreaux, J. L.P.; Kozhevnikov, I.V.; Bastiaens, H. M.J.; van de Kruijs, R. W.E.; Bijkerk, F.; Boller, K. J.

European Conference on Lasers and Electro-Optics, CLEO 2015. Optical Society of America, 2014.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Multilayer filter using the borrmann effect for EUV source monitoring

AU - Barreaux, J. L.P.

AU - Kozhevnikov, I.V.

AU - Bastiaens, H. M.J.

AU - van de Kruijs, R. W.E.

AU - Bijkerk, F.

AU - Boller, K. J.

PY - 2014/7/21

Y1 - 2014/7/21

UR - http://www.scopus.com/inward/record.url?scp=85019519952&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781467374750

BT - European Conference on Lasers and Electro-Optics, CLEO 2015

PB - Optical Society of America

ER -

Barreaux JLP, Kozhevnikov IV, Bastiaens HMJ, van de Kruijs RWE, Bijkerk F, Boller KJ. Multilayer filter using the borrmann effect for EUV source monitoring. In European Conference on Lasers and Electro-Optics, CLEO 2015. Optical Society of America. 2014