Multilayer filter using the borrmann effect for euv source monitoring

J. L.P. Barreaux, I. V. Kozhevnikov, H. M.J. Bastiaens, R. W.E. van de Kruijs, F. Bijkerk, K. J. Boller

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015
PublisherOptical Society of America
ISBN (Electronic)9781467374750
Publication statusPublished - 1 Jan 2019
EventEuropean Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015 - Munich, Germany
Duration: 21 Jun 201525 Jun 2015
http://2015.cleoeurope.org/

Conference

ConferenceEuropean Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015
Abbreviated titleCLEO/EUROPE-EQEC 2015
CountryGermany
CityMunich
Period21/06/1525/06/15
Internet address

Cite this

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F., & Boller, K. J. (2019). Multilayer filter using the borrmann effect for euv source monitoring. In Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 Optical Society of America.