Multilayer filter using the borrmann effect for EUV source monitoring

J. L.P. Barreaux, I. V. Kozhevnikov, H. M.J. Bastiaens, R. W.E. van de Kruijs, F. Bijkerk, K. J. Boller

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationEuropean Conference on Lasers and Electro-Optics, CLEO 2015
PublisherOptical Society of America
ISBN (Electronic)9781467374750
ISBN (Print)9781467374750
Publication statusPublished - 21 Jul 2014
EventEuropean Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015 - Munich, Germany
Duration: 21 Jun 201525 Jun 2015
http://2015.cleoeurope.org/

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceEuropean Conference on Lasers and Electro-Optics, CLEO/EUROPE-EQEC 2015
Abbreviated titleCLEO/EUROPE-EQEC 2015
Country/TerritoryGermany
CityMunich
Period21/06/1525/06/15
Internet address

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