Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography

Viacheslav Medvedev, Robbert Wilhelmus Elisabeth van de Kruijs, Andrey Yakshin, N.N. Novikova, V.M. Krivtsun, A.M. Yakunin, Frederik Bijkerk

Research output: Contribution to journal › Article › Academic › peer-review

9 Citations (Scopus)

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Physics & Astronomy