Multilayers for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin, E. Zoethout, Eric Louis, N. Yakunin, Frederik Bijkerk

Research output: Contribution to conference › Poster

Original languageEnglish
Pages-
Publication statusPublished - 29 Sep 2012
Event2012 International Symposium on Extreme Ultraviolet Lithography - Brussels, Belgium
Duration: 30 Sep 2012 → 4 Oct 2012

Conference

Conference2012 International Symposium on Extreme Ultraviolet Lithography
CountryBelgium
CityBrussels
Period30/09/12 → 4/10/12

Keywords

  • METIS-283392

Cite this

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, N., & Bijkerk, F. (2012). Multilayers for the lithography generation beyond EUVL. -. Poster session presented at 2012 International Symposium on Extreme Ultraviolet Lithography, Brussels, Belgium.
Makhotkin, Igor Alexandrovich ; Zoethout, E. ; Louis, Eric ; Yakunin, N. ; Bijkerk, Frederik. / Multilayers for the lithography generation beyond EUVL. Poster session presented at 2012 International Symposium on Extreme Ultraviolet Lithography, Brussels, Belgium.
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year = "2012",
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note = "2012 International Symposium on Extreme Ultraviolet Lithography ; Conference date: 30-09-2012 Through 04-10-2012",

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Makhotkin, IA, Zoethout, E, Louis, E, Yakunin, N & Bijkerk, F 2012, 'Multilayers for the lithography generation beyond EUVL' 2012 International Symposium on Extreme Ultraviolet Lithography, Brussels, Belgium, 30/09/12 - 4/10/12, pp. -.

Multilayers for the lithography generation beyond EUVL. / Makhotkin, Igor Alexandrovich; Zoethout, E.; Louis, Eric; Yakunin, N.; Bijkerk, Frederik.

2012. - Poster session presented at 2012 International Symposium on Extreme Ultraviolet Lithography, Brussels, Belgium.

Research output: Contribution to conference › Poster

TY - CONF

T1 - Multilayers for the lithography generation beyond EUVL

AU - Makhotkin, Igor Alexandrovich

AU - Zoethout, E.

AU - Louis, Eric

AU - Yakunin, N.

AU - Bijkerk, Frederik

PY - 2012/9/29

Y1 - 2012/9/29

KW - METIS-283392

M3 - Poster

SP - -

ER -

Makhotkin IA, Zoethout E, Louis E, Yakunin N, Bijkerk F. Multilayers for the lithography generation beyond EUVL. 2012. Poster session presented at 2012 International Symposium on Extreme Ultraviolet Lithography, Brussels, Belgium.