Multilayers for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin, E. Zoethout, Eric Louis, N. Yakunin, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 29 Sep 2012
Event2012 International Symposium on Extreme Ultraviolet Lithography - Brussels, Belgium
Duration: 30 Sep 20124 Oct 2012

Conference

Conference2012 International Symposium on Extreme Ultraviolet Lithography
Abbreviated titleEUV Litography
CountryBelgium
CityBrussels
Period30/09/124/10/12

Keywords

  • METIS-283392

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