Multilayers for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin, E. Zoethout, Eric Louis, N. Yakunin, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 29 Sept 2012
Event	2012 International Symposium on Extreme Ultraviolet Lithography - Brussels, Belgium Duration: 30 Sept 2012 → 4 Oct 2012

Conference	2012 International Symposium on Extreme Ultraviolet Lithography
Abbreviated title	EUV Litography
Country/Territory	Belgium
City	Brussels
Period	30/09/12 → 4/10/12

Keywords

@conference{d1da002bfc854f7d82686ce8d0960eaa,

title = "Multilayers for the lithography generation beyond EUVL",

keywords = "METIS-283392",

author = "Makhotkin, \{Igor Alexandrovich\} and E. Zoethout and Eric Louis and N. Yakunin and Frederik Bijkerk",

year = "2012",

month = sep,

day = "29",

language = "English",

pages = "--",

note = "2012 International Symposium on Extreme Ultraviolet Lithography, EUV Litography ; Conference date: 30-09-2012 Through 04-10-2012",

}