Multiple cantilever tool for use in scanning probe microscopy

S. Deladi (Inventor), Johan W. Berenschot (Inventor), Meint J. de Boer (Inventor), Gijsbertus J.M. Krijnen (Inventor), Niels Roelof Tas (Inventor), Michael Curt Elwenspoek (Inventor)

Research output: Patent

Original languageUndefined
Patent numbernog niet bekend
Priority date11/11/03
Publication statusIn preparation - 11 Nov 2003

Keywords

  • METIS-214528

Cite this

Deladi, S., Berenschot, J. W., de Boer, M. J., Krijnen, G. J. M., Tas, N. R., & Elwenspoek, M. C. (2003). Multiple cantilever tool for use in scanning probe microscopy. Manuscript in preparation. (Patent No. nog niet bekend).