Multiple cantilever tool for use in scanning probe microscopy

S. Deladi; Johan W. Berenschot; Meint J. de Boer; Gijsbertus J.M. Krijnen; Niels Roelof Tas; Michael Curt Elwenspoek

Multiple cantilever tool for use in scanning probe microscopy

S. Deladi (Inventor)
, Johan W. Berenschot (Inventor)
, Meint J. de Boer (Inventor)
, Gijsbertus J.M. Krijnen (Inventor)
, Niels Roelof Tas (Inventor)
, Michael Curt Elwenspoek (Inventor)

University of Twente

Research output: Patent

Original language	Undefined
Patent number	nog niet bekend
Priority date	11/11/03
Publication status	In preparation - 11 Nov 2003

Keywords

METIS-214528

Cite this

@misc{585f5300e5fd4e26a407f4322cb86c58,

title = "Multiple cantilever tool for use in scanning probe microscopy",

keywords = "METIS-214528",

author = "S. Deladi and Berenschot, \{Johan W.\} and \{de Boer\}, \{Meint J.\} and Krijnen, \{Gijsbertus J.M.\} and Tas, \{Niels Roelof\} and Elwenspoek, \{Michael Curt\}",

year = "2003",

month = nov,

day = "11",

language = "Undefined",

type = "Patent",

note = "nog niet bekend",

}