Nano-G accelerometer using geometric anti-springs

Boris Anton Boom; A. Bertolini; E. Hennes; Robert Anton Brookhuis; Remco J. Wiegerink; J.F.J. van den Brand; M.G. Beker; A. Oner; D. van Wees

doi:10.1109/MEMSYS.2017.7863332

Nano-G accelerometer using geometric anti-springs

Boris Anton Boom, A. Bertolini, E. Hennes, Robert Anton Brookhuis, Remco J. Wiegerink, J.F.J. van den Brand, M.G. Beker, A. Oner, D. van Wees

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Pages	33-36
Number of pages	4
ISBN (Electronic)	978-1-5090-5078-9
ISBN (Print)	978-1-5090-5079-6
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863332
Publication status	Published - 22 Jan 2017
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Rio Las Vegas Hotel and Casino, Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017 Conference number: 30

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Abbreviated title	MEMS
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

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10.1109/MEMSYS.2017.7863332

Article Nano-G accelerometer using geometric anti-springsFinal published version, 1.4 MB

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@inproceedings{8d820a74be3f423b97e8209c59358db7,

title = "Nano-G accelerometer using geometric anti-springs",

abstract = "We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.",

author = "Boom, {Boris Anton} and A. Bertolini and E. Hennes and Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and {van den Brand}, J.F.J. and M.G. Beker and A. Oner and {van Wees}, D.",

year = "2017",

month = jan,

day = "22",

doi = "10.1109/MEMSYS.2017.7863332",

language = "English",

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pages = "33--36",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, MEMS ; Conference date: 22-01-2017 Through 26-01-2017",

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Boom, BA, Bertolini, A, Hennes, E, Brookhuis, RA, Wiegerink, RJ, van den Brand, JFJ, Beker, MG, Oner, A & van Wees, D 2017, Nano-G accelerometer using geometric anti-springs. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, pp. 33-36, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, Nevada, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863332

TY - GEN

T1 - Nano-G accelerometer using geometric anti-springs

AU - Boom, Boris Anton

AU - Bertolini, A.

AU - Hennes, E.

AU - Brookhuis, Robert Anton

AU - Wiegerink, Remco J.

AU - van den Brand, J.F.J.

AU - Beker, M.G.

AU - Oner, A.

AU - van Wees, D.

N1 - Conference code: 30

PY - 2017/1/22

Y1 - 2017/1/22

N2 - We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.

AB - We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.

U2 - 10.1109/MEMSYS.2017.7863332

DO - 10.1109/MEMSYS.2017.7863332

M3 - Conference contribution

SN - 978-1-5090-5079-6

SP - 33

EP - 36

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Nano-G accelerometer using geometric anti-springs

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