Nano-G accelerometer using geometric anti-springs

Boris Anton Boom, A. Bertolini, E. Hennes, Robert Anton Brookhuis, Remco J. Wiegerink, J.F.J. Brand, van den, M.G. Beker, A. Oner, D. Wees, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.
Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Pages33-36
Number of pages4
ISBN (Electronic)978-1-5090-5078-9
ISBN (Print)978-1-5090-5079-6
DOIs
Publication statusPublished - 22 Jan 2017
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Rio Las Vegas Hotel and Casino, Las Vegas, United States
Duration: 22 Jan 201726 Jan 2017
Conference number: 30

Conference

Conference30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Abbreviated titleMEMS
CountryUnited States
CityLas Vegas
Period22/01/1726/01/17

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Accelerometers
Stiffness
Leaf springs
Mechanics
Bandwidth

Cite this

Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., ... Wees, van, D. (2017). Nano-G accelerometer using geometric anti-springs. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 33-36). IEEE. https://doi.org/10.1109/MEMSYS.2017.7863332
Boom, Boris Anton ; Bertolini, A. ; Hennes, E. ; Brookhuis, Robert Anton ; Wiegerink, Remco J. ; Brand, van den, J.F.J. ; Beker, M.G. ; Oner, A. ; Wees, van, D. / Nano-G accelerometer using geometric anti-springs. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2017. pp. 33-36
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abstract = "We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.",
author = "Boom, {Boris Anton} and A. Bertolini and E. Hennes and Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and {Brand, van den}, J.F.J. and M.G. Beker and A. Oner and {Wees, van}, D.",
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Boom, BA, Bertolini, A, Hennes, E, Brookhuis, RA, Wiegerink, RJ, Brand, van den, JFJ, Beker, MG, Oner, A & Wees, van, D 2017, Nano-G accelerometer using geometric anti-springs. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, pp. 33-36, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863332

Nano-G accelerometer using geometric anti-springs. / Boom, Boris Anton; Bertolini, A.; Hennes, E.; Brookhuis, Robert Anton; Wiegerink, Remco J.; Brand, van den, J.F.J.; Beker, M.G.; Oner, A.; Wees, van, D.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2017. p. 33-36.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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N2 - We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.

AB - We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.

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Boom BA, Bertolini A, Hennes E, Brookhuis RA, Wiegerink RJ, Brand, van den JFJ et al. Nano-G accelerometer using geometric anti-springs. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE. 2017. p. 33-36 https://doi.org/10.1109/MEMSYS.2017.7863332