Nano-G accelerometer using geometric anti-springs

Boris Anton Boom, A. Bertolini, E. Hennes, Robert Anton Brookhuis, Remco J. Wiegerink, J.F.J. Brand, van den, M.G. Beker, A. Oner, D. Wees, van

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    19 Citations (Scopus)
    380 Downloads (Pure)

    Abstract

    We report an ultra-sensitive seismic accelerometer with nano-g sensitivity, using geometric anti-spring technology. High sensitivity is achieved by an on-chip mechanical preloading system comprising four sets of curved leaf springs that support a proof-mass. Using this preloading mechanism, stiffness reduction up to a factor 26 in the sensing direction has been achieved. This increases the sensitivity to acceleration by the same factor. The stiffness reduction is independent of the proof-mass position, preserving the linear properties of the mechanics and due to its purely mechanical realization, no power is consumed when the accelerometer is in its preloaded state. Equivalent acceleration noise levels below 2ng/√Hz have been demonstrated in a 50 Hz bandwidth, using a capacitive half-bridge read-out.
    Original languageEnglish
    Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
    PublisherIEEE
    Pages33-36
    Number of pages4
    ISBN (Electronic)978-1-5090-5078-9
    ISBN (Print)978-1-5090-5079-6
    DOIs
    Publication statusPublished - 22 Jan 2017
    Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Rio Las Vegas Hotel and Casino, Las Vegas, United States
    Duration: 22 Jan 201726 Jan 2017
    Conference number: 30

    Conference

    Conference30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
    Abbreviated titleMEMS
    CountryUnited States
    CityLas Vegas
    Period22/01/1726/01/17

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