Nano-pyramid arrays for nano-particle trapping

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Abstract

Abstract In this paper we present the drastic miniaturization of nano-wire pyramids fabricated by corner lithography. A particle trapping device was fabricated in a well-defined and symmetrical array. The entrance and exit hole-size can be tuned by adjusting fabrication parameters. We describe here in detail the effect of the corner lithography over-etch factor on side-aperture size and shape. To show the trapping functionality, 150 nm gold nano-particles trapping was demonstrated and the device with trapped particles was imaged by Scanning Electron Microscopy (SEM). © 2016 IEEE.
Original languageEnglish
Title of host publicationNano-pyramid arrays for nano-particle trapping
Place of PublicationCategory numberCFP16MEM-ART; Code 119597
Pages185-188
DOIs
Publication statusPublished - 24 Jan 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 24 Jan 201628 Jan 2016
Conference number: 29

Publication series

Name
Volume7421589
ISSN (Print)1084-6999

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Abbreviated titleMEMS
CountryChina
CityShanghai
Period24/01/1628/01/16

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Keywords

  • METIS-320592
  • IR-103877

Cite this

Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E., & Tas, N. R. (2016). Nano-pyramid arrays for nano-particle trapping. In Nano-pyramid arrays for nano-particle trapping (pp. 185-188). Category numberCFP16MEM-ART; Code 119597. https://doi.org/10.1109/MEMSYS.2016.7421589