Nanochannel Fabrication and characterization using bond micromachining

This thesis deals with the fabrication and characterization of nanochannels (channels with at least one dimension in the sub-100 nm range). These channels are important for various areas of research, including DNA analysis systems and chemical sensors. In addition, the behavior of liquids in nano-confinement is of interest for many of the applications. The technologies currently used to fabricate nanochannels are often expensive and/or time consuming or simply not accurate enough. This creates a need for controlled, yet simple fabrication technologies.