Nanochannel Fabrication and characterization using bond micromachining

Jeroen Haneveld

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    77 Downloads (Pure)

    Abstract

    This thesis deals with the fabrication and characterization of nanochannels (channels with at least one dimension in the sub-100 nm range). These channels are important for various areas of research, including DNA analysis systems and chemical sensors. In addition, the behavior of liquids in nano-confinement is of interest for many of the applications. The technologies currently used to fabricate nanochannels are often expensive and/or time consuming or simply not accurate enough. This creates a need for controlled, yet simple fabrication technologies.
    Original languageEnglish
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Elwenspoek, M.C., Supervisor
    • Jansen, H.V., Co-Supervisor
    Thesis sponsors
    Award date20 Jan 2006
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-365-2312-5
    Publication statusPublished - 20 Jan 2006

    Keywords

    • EWI-8972
    • METIS-228203
    • IR-51105

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